Fabrication of on-chip fuel cells on polymer substrates

Satoshi Tominaka*, Hiroshi Nishizeko, Hidetoshi Shinohara, Jun Mizuno, Tetsuya Osaka

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Here we report fabrication of tiny on-chip fuel cells on polymer films. Since on-chip cells which we have so far fabricated on silicon substrates through a series of microfabrication procedures are of a simple microchannel-based design, their fabrication on a polymer substrate by molding is attractive in terms of the rapid fabrication and of the inexpensive fabrication procedures and materials. To do so, a nickel mold was first prepared by electroplating from the conventional silicon-based cell, i.e., a master, and then the cell was replicated on cycloolefin polymer films by hot embossing. The microchannel thus replicated on the polymer film was confirmed to be almost identical to the silicon master by observation with a confocal microscope. Finally, Au current collectors sufficiently adhesive to the polymer were successfully deposited after the surface modification by an oxygen plasma treatment.

Original languageEnglish
Title of host publicationECS Transactions -Proton Exchange Membrane Fuel Cells 9
Number of pages9
Edition1 PART 2
Publication statusPublished - 2009
Event9th Proton Exchange Membrane Fuel Cell Symposium (PEMFC 9) - 216th Meeting of the Electrochemical Society - Vienna, Austria
Duration: 2009 Oct 42009 Oct 9

Publication series

NameECS Transactions
Number1 PART 2
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737


Conference9th Proton Exchange Membrane Fuel Cell Symposium (PEMFC 9) - 216th Meeting of the Electrochemical Society

ASJC Scopus subject areas

  • Engineering(all)


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