Abstract
We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.
| Original language | English |
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| Title of host publication | 2017 International Conference on Electronics Packaging, ICEP 2017 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 148-151 |
| Number of pages | 4 |
| ISBN (Electronic) | 9784990218836 |
| DOIs | |
| Publication status | Published - 2017 Jun 5 |
| Event | 2017 International Conference on Electronics Packaging, ICEP 2017 - Tendo, Yamagata, Japan Duration: 2017 Apr 19 → 2017 Apr 22 |
Other
| Other | 2017 International Conference on Electronics Packaging, ICEP 2017 |
|---|---|
| Country/Territory | Japan |
| City | Tendo, Yamagata |
| Period | 17/4/19 → 17/4/22 |
Keywords
- 3D fabrication
- curved surface
- optical devices
- self-standing film
- soft-UV imprint
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Industrial and Manufacturing Engineering
- Electronic, Optical and Magnetic Materials