Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device

Masaki Nishimura; Hayato Takemura; Toshimasa Umezawa; Wittawat Yamwong; Tetsuya Kawanishi; Naokatsu Yamamoto; Nipapan Klunngien

doi:10.1109/OECC48412.2020.9273608

Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device

Masaki Nishimura, Hayato Takemura, Toshimasa Umezawa, Wittawat Yamwong, Tetsuya Kawanishi, Naokatsu Yamamoto, Nipapan Klunngien

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We fabricated sputtered SiN-waveguides with film stress-free, low-loss waveguide at room temperature for optical phased array devices. The beam steering performance was also estimated using the sputtered thick SiN waveguide.

Original language	English
Title of host publication	25th Opto-Electronics and Communications Conference, OECC 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728154459
DOIs	https://doi.org/10.1109/OECC48412.2020.9273608
Publication status	Published - 2020 Oct 4
Event	25th Opto-Electronics and Communications Conference, OECC 2020 - Taipei, Taiwan, Province of China Duration: 2020 Oct 4 → 2020 Oct 8

Publication series

Name	25th Opto-Electronics and Communications Conference, OECC 2020

Conference

Conference	25th Opto-Electronics and Communications Conference, OECC 2020
Country/Territory	Taiwan, Province of China
City	Taipei
Period	20/10/4 → 20/10/8

Keywords

SiN
optical phased array
sputtering
stress-free

ASJC Scopus subject areas

Computer Networks and Communications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/OECC48412.2020.9273608

Cite this

Nishimura, M., Takemura, H., Umezawa, T., Yamwong, W., Kawanishi, T., Yamamoto, N., & Klunngien, N. (2020). Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device. In 25th Opto-Electronics and Communications Conference, OECC 2020 Article 9273608 (25th Opto-Electronics and Communications Conference, OECC 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OECC48412.2020.9273608

Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device. / Nishimura, Masaki; Takemura, Hayato; Umezawa, Toshimasa et al.
25th Opto-Electronics and Communications Conference, OECC 2020. Institute of Electrical and Electronics Engineers Inc., 2020. 9273608 (25th Opto-Electronics and Communications Conference, OECC 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nishimura, M, Takemura, H, Umezawa, T, Yamwong, W, Kawanishi, T, Yamamoto, N & Klunngien, N 2020, Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device. in 25th Opto-Electronics and Communications Conference, OECC 2020., 9273608, 25th Opto-Electronics and Communications Conference, OECC 2020, Institute of Electrical and Electronics Engineers Inc., 25th Opto-Electronics and Communications Conference, OECC 2020, Taipei, Taiwan, Province of China, 20/10/4. https://doi.org/10.1109/OECC48412.2020.9273608

Nishimura M, Takemura H, Umezawa T, Yamwong W, Kawanishi T, Yamamoto N et al. Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device. In 25th Opto-Electronics and Communications Conference, OECC 2020. Institute of Electrical and Electronics Engineers Inc. 2020. 9273608. (25th Opto-Electronics and Communications Conference, OECC 2020). doi: 10.1109/OECC48412.2020.9273608

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title = "Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device",

abstract = "We fabricated sputtered SiN-waveguides with film stress-free, low-loss waveguide at room temperature for optical phased array devices. The beam steering performance was also estimated using the sputtered thick SiN waveguide.",

keywords = "SiN, optical phased array, sputtering, stress-free",

author = "Masaki Nishimura and Hayato Takemura and Toshimasa Umezawa and Wittawat Yamwong and Tetsuya Kawanishi and Naokatsu Yamamoto and Nipapan Klunngien",

note = "Funding Information: ACKNOWLEDGMENT This study was conducted as part of a research project supported by the Japanese Government funding for the “R&D to Expand Radio Frequency Resources” by the Ministry of Internal Affairs and Communications. We thank all the technical staff in the photonic device laboratory at NICT. Publisher Copyright: {\textcopyright} 2020 IEEE.; 25th Opto-Electronics and Communications Conference, OECC 2020 ; Conference date: 04-10-2020 Through 08-10-2020",

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doi = "10.1109/OECC48412.2020.9273608",

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AU - Yamwong, Wittawat

AU - Kawanishi, Tetsuya

AU - Yamamoto, Naokatsu

AU - Klunngien, Nipapan

N1 - Funding Information: ACKNOWLEDGMENT This study was conducted as part of a research project supported by the Japanese Government funding for the “R&D to Expand Radio Frequency Resources” by the Ministry of Internal Affairs and Communications. We thank all the technical staff in the photonic device laboratory at NICT. Publisher Copyright: © 2020 IEEE.

PY - 2020/10/4

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N2 - We fabricated sputtered SiN-waveguides with film stress-free, low-loss waveguide at room temperature for optical phased array devices. The beam steering performance was also estimated using the sputtered thick SiN waveguide.

AB - We fabricated sputtered SiN-waveguides with film stress-free, low-loss waveguide at room temperature for optical phased array devices. The beam steering performance was also estimated using the sputtered thick SiN waveguide.

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KW - sputtering

KW - stress-free

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T3 - 25th Opto-Electronics and Communications Conference, OECC 2020

BT - 25th Opto-Electronics and Communications Conference, OECC 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 25th Opto-Electronics and Communications Conference, OECC 2020

Y2 - 4 October 2020 through 8 October 2020

ER -

Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

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