Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

Daisuke Uchida, Masaki Kanai, Takahiro Nishimoto, Shuichi Shoji

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


PDMS microstructures whose whole inner surfaces are covered with perfluoro polymer are described. The major problems of PDMS microfluidic devices in Micro Total Analysis Systems (µTAS) applications are surface degradation with organic solvents and unexpected adsorption of chemical materials. In order to overcome these problems, perfluoro amorphous polymer is coated on the PDMS micro structures. This method is useful to realize chemical durability of the PDMS microfluidic devices. And novel method for fabricating metal electrodes on the perfluoro polymer is also proposed.

Original languageEnglish
Pages (from-to)364-368
Number of pages5
Journalieej transactions on sensors and micromachines
Issue number10
Publication statusPublished - 2006


  • PDMS
  • metal electrode
  • molding
  • perfluoro amorphous polymer

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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