Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

Daisuke Uchida; Masaki Kanai; Takahiro Nishimoto; Shuichi Shoji

doi:10.1541/ieejsmas.124.364

Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

Daisuke Uchida, Masaki Kanai, Takahiro Nishimoto, Shuichi Shoji

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

PDMS microstructures whose whole inner surfaces are covered with perfluoro polymer are described. The major problems of PDMS microfluidic devices in Micro Total Analysis Systems (µTAS) applications are surface degradation with organic solvents and unexpected adsorption of chemical materials. In order to overcome these problems, perfluoro amorphous polymer is coated on the PDMS micro structures. This method is useful to realize chemical durability of the PDMS microfluidic devices. And novel method for fabricating metal electrodes on the perfluoro polymer is also proposed.

Original language	English
Pages (from-to)	364-368
Number of pages	5
Journal	ieej transactions on sensors and micromachines
Volume	124
Issue number	10
DOIs	https://doi.org/10.1541/ieejsmas.124.364
Publication status	Published - 2006

Keywords

CYTOP
PDMS
metal electrode
molding
perfluoro amorphous polymer

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.124.364

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abstract = "PDMS microstructures whose whole inner surfaces are covered with perfluoro polymer are described. The major problems of PDMS microfluidic devices in Micro Total Analysis Systems (µTAS) applications are surface degradation with organic solvents and unexpected adsorption of chemical materials. In order to overcome these problems, perfluoro amorphous polymer is coated on the PDMS micro structures. This method is useful to realize chemical durability of the PDMS microfluidic devices. And novel method for fabricating metal electrodes on the perfluoro polymer is also proposed.",

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author = "Daisuke Uchida and Masaki Kanai and Takahiro Nishimoto and Shuichi Shoji",

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language = "English",

volume = "124",

pages = "364--368",

journal = "ieej transactions on sensors and micromachines",

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T1 - Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

AU - Uchida, Daisuke

AU - Kanai, Masaki

AU - Nishimoto, Takahiro

AU - Shoji, Shuichi

PY - 2006

Y1 - 2006

N2 - PDMS microstructures whose whole inner surfaces are covered with perfluoro polymer are described. The major problems of PDMS microfluidic devices in Micro Total Analysis Systems (µTAS) applications are surface degradation with organic solvents and unexpected adsorption of chemical materials. In order to overcome these problems, perfluoro amorphous polymer is coated on the PDMS micro structures. This method is useful to realize chemical durability of the PDMS microfluidic devices. And novel method for fabricating metal electrodes on the perfluoro polymer is also proposed.

AB - PDMS microstructures whose whole inner surfaces are covered with perfluoro polymer are described. The major problems of PDMS microfluidic devices in Micro Total Analysis Systems (µTAS) applications are surface degradation with organic solvents and unexpected adsorption of chemical materials. In order to overcome these problems, perfluoro amorphous polymer is coated on the PDMS micro structures. This method is useful to realize chemical durability of the PDMS microfluidic devices. And novel method for fabricating metal electrodes on the perfluoro polymer is also proposed.

KW - CYTOP

KW - PDMS

KW - metal electrode

KW - molding

KW - perfluoro amorphous polymer

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JF - ieej transactions on sensors and micromachines

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Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

Abstract

Keywords

ASJC Scopus subject areas

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