Fabrication of two-and three-dimensional photonic crystals of titania with submicrometer resolution by deep x-ray lithography

Koichi Awazu*, Xiaomin Wang, Makoto Fujimaki, Taketo Kuriyama, Akihide Sai, Yoshimichi Ohki, Hiroaki Imai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

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