Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

Yoshito Nozaki; T. Kanai; A. Matsuo; Daiki Tanaka; Isamu Yuito; Teruaki Takeuchi; Tetsushi Sekiguchi; Shuichi Shoji

doi:10.1109/NANO.2016.7751484

Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

Yoshito Nozaki, T. Kanai, A. Matsuo, Daiki Tanaka, Isamu Yuito, Teruaki Takeuchi, Tetsushi Sekiguchi, Shuichi Shoji

Research Organization for Nano & Life Innovation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.

Original language	English
Title of host publication	16th International Conference on Nanotechnology - IEEE NANO 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	795-798
Number of pages	4
ISBN (Electronic)	9781509039142
DOIs	https://doi.org/10.1109/NANO.2016.7751484
Publication status	Published - 2016 Nov 21
Event	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan Duration: 2016 Aug 22 → 2016 Aug 25

Other

Other	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Country/Territory	Japan
City	Sendai
Period	16/8/22 → 16/8/25

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/NANO.2016.7751484

Cite this

Nozaki, Y., Kanai, T., Matsuo, A., Tanaka, D., Yuito, I., Takeuchi, T., Sekiguchi, T., & Shoji, S. (2016). Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 795-798). Article 7751484 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751484

Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. / Nozaki, Yoshito; Kanai, T.; Matsuo, A. et al.
16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 795-798 7751484.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nozaki, Y, Kanai, T, Matsuo, A, Tanaka, D, Yuito, I, Takeuchi, T, Sekiguchi, T & Shoji, S 2016, Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. in 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751484, Institute of Electrical and Electronics Engineers Inc., pp. 795-798, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, Japan, 16/8/22. https://doi.org/10.1109/NANO.2016.7751484

@inproceedings{a4633f7f157849d995e695bf8d01ecee,

title = "Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system",

abstract = "We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.",

author = "Yoshito Nozaki and T. Kanai and A. Matsuo and Daiki Tanaka and Isamu Yuito and Teruaki Takeuchi and Tetsushi Sekiguchi and Shuichi Shoji",

year = "2016",

month = nov,

day = "21",

doi = "10.1109/NANO.2016.7751484",

language = "English",

pages = "795--798",

booktitle = "16th International Conference on Nanotechnology - IEEE NANO 2016",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

note = "16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 ; Conference date: 22-08-2016 Through 25-08-2016",

}

TY - GEN

T1 - Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

AU - Nozaki, Yoshito

AU - Kanai, T.

AU - Matsuo, A.

AU - Tanaka, Daiki

AU - Yuito, Isamu

AU - Takeuchi, Teruaki

AU - Sekiguchi, Tetsushi

AU - Shoji, Shuichi

PY - 2016/11/21

Y1 - 2016/11/21

N2 - We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.

AB - We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.

UR - http://www.scopus.com/inward/record.url?scp=85006851405&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85006851405&partnerID=8YFLogxK

U2 - 10.1109/NANO.2016.7751484

DO - 10.1109/NANO.2016.7751484

M3 - Conference contribution

AN - SCOPUS:85006851405

SP - 795

EP - 798

BT - 16th International Conference on Nanotechnology - IEEE NANO 2016

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016

Y2 - 22 August 2016 through 25 August 2016

ER -

Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

Abstract

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this