Fabry-Perot optical modulator fabricated by aerosol deposition

Masafumi Nakada*, Keishi Ohashi, Hiroki Tsuda, Jun Akedo

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)


We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.

Original languageEnglish
Article number605004
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2005 Dec 1
Externally publishedYes
EventOptomechatronic Micro/Nano Devices and Components - Sappora, Japan
Duration: 2005 Dec 52005 Dec 7


  • Aerosol deposition
  • Electro-optic
  • Fabry-Perot
  • Optical modulator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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