Fabry-Perot optical modulator fabricated by aerosol deposition

Masafumi Nakada; Keishi Ohashi; Hiroki Tsuda; Jun Akedo

doi:10.1117/12.648338

Fabry-Perot optical modulator fabricated by aerosol deposition

Masafumi Nakada^*, Keishi Ohashi, Hiroki Tsuda, Jun Akedo

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O₃ film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO₃. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O₃. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.

Original language	English
Article number	605004
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6050
DOIs	https://doi.org/10.1117/12.648338
Publication status	Published - 2005 Dec 1
Externally published	Yes
Event	Optomechatronic Micro/Nano Devices and Components - Sappora, Japan Duration: 2005 Dec 5 → 2005 Dec 7

Keywords

Aerosol deposition
Electro-optic
Fabry-Perot
Optical modulator

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.648338

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title = "Fabry-Perot optical modulator fabricated by aerosol deposition",

abstract = "We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.",

keywords = "Aerosol deposition, Electro-optic, Fabry-Perot, Optical modulator",

author = "Masafumi Nakada and Keishi Ohashi and Hiroki Tsuda and Jun Akedo",

year = "2005",

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doi = "10.1117/12.648338",

language = "English",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Optomechatronic Micro/Nano Devices and Components ; Conference date: 05-12-2005 Through 07-12-2005",

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TY - JOUR

T1 - Fabry-Perot optical modulator fabricated by aerosol deposition

AU - Nakada, Masafumi

AU - Ohashi, Keishi

AU - Tsuda, Hiroki

AU - Akedo, Jun

PY - 2005/12/1

Y1 - 2005/12/1

N2 - We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.

AB - We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.

KW - Aerosol deposition

KW - Electro-optic

KW - Fabry-Perot

KW - Optical modulator

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U2 - 10.1117/12.648338

DO - 10.1117/12.648338

M3 - Conference article

AN - SCOPUS:33645070807

SN - 0277-786X

VL - 6050

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 605004

T2 - Optomechatronic Micro/Nano Devices and Components

Y2 - 5 December 2005 through 7 December 2005

ER -

Fabry-Perot optical modulator fabricated by aerosol deposition

Abstract

Keywords

ASJC Scopus subject areas

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