TY - GEN
T1 - Fingerprint imaging with arrayed GHz PbTiO3 transducers
AU - Koike, Yuna
AU - Sato, Yusuke
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734).
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - Fingerprint readers based on pMUTs using PZT and ScAlN are extensively studied. However, the resonance frequency of pMUTs is in the MHz range. In contrast, AlN transducers using the thickness extensional mode in the GHz range are an attractive approach to improve spatial resolution. However, the capacitive impedance of AlN transducer becomes high when the size of the acoustic source is reduced. To obtain small acoustic source with impedance matching, we proposed epitaxial PbTiO3 (PTO) transducer. The relative dielectric constant of PTO is about 80, thus the spatial resolution can be further improved. Therefore, in this study, we conducted fingerprint imaging using PTO epitaxial thin films with a network analyzer, and we succeeded to acquire fingerprint images.
AB - Fingerprint readers based on pMUTs using PZT and ScAlN are extensively studied. However, the resonance frequency of pMUTs is in the MHz range. In contrast, AlN transducers using the thickness extensional mode in the GHz range are an attractive approach to improve spatial resolution. However, the capacitive impedance of AlN transducer becomes high when the size of the acoustic source is reduced. To obtain small acoustic source with impedance matching, we proposed epitaxial PbTiO3 (PTO) transducer. The relative dielectric constant of PTO is about 80, thus the spatial resolution can be further improved. Therefore, in this study, we conducted fingerprint imaging using PTO epitaxial thin films with a network analyzer, and we succeeded to acquire fingerprint images.
KW - fingerprint imaging
KW - PbTiO epitaxial thin film
KW - Ultrasonic transducer
UR - http://www.scopus.com/inward/record.url?scp=85137178892&partnerID=8YFLogxK
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U2 - 10.1109/IC-MAM55200.2022.9855326
DO - 10.1109/IC-MAM55200.2022.9855326
M3 - Conference contribution
AN - SCOPUS:85137178892
T3 - IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
SP - 17
EP - 20
BT - IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
Y2 - 18 July 2022 through 20 July 2022
ER -