FingerprintDive into the research topics of 'Formation of SiGe and SiGeC layers on Si by Ge and C ion implantation and subsequent ion-beam-induced epitaxial crystallization'. Together they form a unique fingerprint.
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Naoto Kobayashi*, Masataka Hasegawa, J. R. Phillips, Nobuyuki Hayashi, Hisao Tanoue, Hajime Shibata, Yunosuke Makita
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution