Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow

Hironobu Sato; Seiki Ito; Kenji Tajima; Norimune Orimoto; Shuichi Shoji

Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow

Hironobu Sato^*, Seiki Ito, Kenji Tajima, Norimune Orimoto, Shuichi Shoji

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper presents the functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels could generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method of the 3-D SU-8 molds using 2 step inclined backside exposures and additional 2 step topside exposures. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

Original language	English
Pages (from-to)	693-696
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication status	Published - 2004 Jul 19
Event	17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: 2004 Jan 25 → 2004 Jan 29

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

@article{bdc7753fbb494878a690500646ba0e5a,

title = "Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow",

abstract = "This paper presents the functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels could generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method of the 3-D SU-8 molds using 2 step inclined backside exposures and additional 2 step topside exposures. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.",

author = "Hironobu Sato and Seiki Ito and Kenji Tajima and Norimune Orimoto and Shuichi Shoji",

year = "2004",

month = jul,

day = "19",

language = "English",

pages = "693--696",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest ; Conference date: 25-01-2004 Through 29-01-2004",

}

TY - JOUR

T1 - Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow

AU - Sato, Hironobu

AU - Ito, Seiki

AU - Tajima, Kenji

AU - Orimoto, Norimune

AU - Shoji, Shuichi

PY - 2004/7/19

Y1 - 2004/7/19

N2 - This paper presents the functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels could generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method of the 3-D SU-8 molds using 2 step inclined backside exposures and additional 2 step topside exposures. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

AB - This paper presents the functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels could generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method of the 3-D SU-8 molds using 2 step inclined backside exposures and additional 2 step topside exposures. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

UR - http://www.scopus.com/inward/record.url?scp=3042820709&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3042820709&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:3042820709

SN - 1084-6999

SP - 693

EP - 696

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest

Y2 - 25 January 2004 through 29 January 2004

ER -

Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow

Abstract

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this