Global standardization of scanning probe microscopy

Daisuke Fujita*, Hiroshi Itoh, Shingo Ichimura, Tomizo Kurosawa

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

46 Citations (Scopus)


Recent efforts to achieve global standardization of scanning probe microscopy (SPM) including noncontact atomic force microscopy (NC-AFM), especially through the International Organization for Standardization (ISO) and related research, are surveyed. Since the unification of terminology for SPM is a prerequisite for standardization, it should have the first priority, followed by the unification of data management and treatment, which will enable access to and processing of SPM data collected by different types of instrument. Among the various SPM analytical methods, the dimensional metrology of SPM is regarded to be the first priority for standardization. This requires solving two basic problems: calibrating the x, y, and z coordinate axes with traceability to the SI unit of length, and eliminating the morphological artefacts caused by the shape of the probe tip. Pre-standardization efforts on restoring distorted images and characterizing the tip shape during use are discussed.

Original languageEnglish
Article number084002
Issue number8
Publication statusPublished - 2007 Feb 28
Externally publishedYes

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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