Growth of trumpet-like protrusions during the CVD of silicon carbide films

Yuya Kajikawa; Hideki Ono; Suguru Noda; Hiroshi Komiyama

doi:10.1002/1521-3862(20020304)8:2<52::AID-CVDE52>3.0.CO;2-R

Growth of trumpet-like protrusions during the CVD of silicon carbide films

Yuya Kajikawa^*, Hideki Ono, Suguru Noda, Hiroshi Komiyama

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Original language	English
Pages (from-to)	52-55
Number of pages	4
Journal	Chemical Vapor Deposition
Volume	8
Issue number	2
DOIs	https://doi.org/10.1002/1521-3862(20020304)8:2<52::AID-CVDE52>3.0.CO;2-R
Publication status	Published - 2002 Mar
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Surfaces and Interfaces
Process Chemistry and Technology

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10.1002/1521-3862(20020304)8:2<52::AID-CVDE52>3.0.CO;2-R

Cite this

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title = "Growth of trumpet-like protrusions during the CVD of silicon carbide films",

author = "Yuya Kajikawa and Hideki Ono and Suguru Noda and Hiroshi Komiyama",

year = "2002",

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language = "English",

volume = "8",

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journal = "Chemical Vapor Deposition",

issn = "0948-1907",

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TY - JOUR

T1 - Growth of trumpet-like protrusions during the CVD of silicon carbide films

AU - Kajikawa, Yuya

AU - Ono, Hideki

AU - Noda, Suguru

AU - Komiyama, Hiroshi

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M3 - Article

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JO - Chemical Vapor Deposition

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Growth of trumpet-like protrusions during the CVD of silicon carbide films

ASJC Scopus subject areas

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