Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform

Tatsurou Hiraki; Takuma Aihara; Takuro Fujii; Koji Takeda; Tai Tsuchizawa; Takaaki Kakitsuka; Hiroshi Fukuda; Shinji Matsuo

doi:10.1109/ECOC.2018.8535448

Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform

Tatsurou Hiraki, Takuma Aihara, Takuro Fujii, Koji Takeda, Tai Tsuchizawa, Takaaki Kakitsuka, Hiroshi Fukuda, Shinji Matsuo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

A Mach-Zehnder modulator with 300-μ m-Iong membrane InGaAsP phase shifters shows V, L of 0.3 Vcm and 40-Gbit/s NRZ modulations in the C band. Low-temperature-deposited hydrogen-free SiN waveguides enable us to construct the Mach-Zehnder interferometer on a Si platform.

Original language	English
Title of host publication	2018 European Conference on Optical Communication, ECOC 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538648629
DOIs	https://doi.org/10.1109/ECOC.2018.8535448
Publication status	Published - 2018 Nov 14
Externally published	Yes
Event	2018 European Conference on Optical Communication, ECOC 2018 - Rome, Italy Duration: 2018 Sept 23 → 2018 Sept 27

Publication series

Name	European Conference on Optical Communication, ECOC
Volume	2018-September

Conference

Conference	2018 European Conference on Optical Communication, ECOC 2018
Country/Territory	Italy
City	Rome
Period	18/9/23 → 18/9/27

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/ECOC.2018.8535448

Cite this

Hiraki, T., Aihara, T., Fujii, T., Takeda, K., Tsuchizawa, T., Kakitsuka, T., Fukuda, H., & Matsuo, S. (2018). Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. In 2018 European Conference on Optical Communication, ECOC 2018 [8535448] (European Conference on Optical Communication, ECOC; Vol. 2018-September). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ECOC.2018.8535448

Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. / Hiraki, Tatsurou; Aihara, Takuma; Fujii, Takuro et al.
2018 European Conference on Optical Communication, ECOC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 8535448 (European Conference on Optical Communication, ECOC; Vol. 2018-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hiraki, T, Aihara, T, Fujii, T, Takeda, K, Tsuchizawa, T, Kakitsuka, T, Fukuda, H & Matsuo, S 2018, Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. in 2018 European Conference on Optical Communication, ECOC 2018., 8535448, European Conference on Optical Communication, ECOC, vol. 2018-September, Institute of Electrical and Electronics Engineers Inc., 2018 European Conference on Optical Communication, ECOC 2018, Rome, Italy, 18/9/23. https://doi.org/10.1109/ECOC.2018.8535448

Hiraki T, Aihara T, Fujii T, Takeda K, Tsuchizawa T, Kakitsuka T et al. Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. In 2018 European Conference on Optical Communication, ECOC 2018. Institute of Electrical and Electronics Engineers Inc. 2018. 8535448. (European Conference on Optical Communication, ECOC). doi: 10.1109/ECOC.2018.8535448

Hiraki, Tatsurou ; Aihara, Takuma ; Fujii, Takuro et al. / Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. 2018 European Conference on Optical Communication, ECOC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. (European Conference on Optical Communication, ECOC).

@inproceedings{df7691e121954b90b3e1b791d917568d,

title = "Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform",

abstract = "A Mach-Zehnder modulator with 300-μ m-Iong membrane InGaAsP phase shifters shows V, L of 0.3 Vcm and 40-Gbit/s NRZ modulations in the C band. Low-temperature-deposited hydrogen-free SiN waveguides enable us to construct the Mach-Zehnder interferometer on a Si platform.",

author = "Tatsurou Hiraki and Takuma Aihara and Takuro Fujii and Koji Takeda and Tai Tsuchizawa and Takaaki Kakitsuka and Hiroshi Fukuda and Shinji Matsuo",

year = "2018",

month = nov,

day = "14",

doi = "10.1109/ECOC.2018.8535448",

language = "English",

series = "European Conference on Optical Communication, ECOC",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2018 European Conference on Optical Communication, ECOC 2018",

note = "2018 European Conference on Optical Communication, ECOC 2018 ; Conference date: 23-09-2018 Through 27-09-2018",

}

TY - GEN

T1 - Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform

AU - Hiraki, Tatsurou

AU - Aihara, Takuma

AU - Fujii, Takuro

AU - Takeda, Koji

AU - Tsuchizawa, Tai

AU - Kakitsuka, Takaaki

AU - Fukuda, Hiroshi

AU - Matsuo, Shinji

PY - 2018/11/14

Y1 - 2018/11/14

N2 - A Mach-Zehnder modulator with 300-μ m-Iong membrane InGaAsP phase shifters shows V, L of 0.3 Vcm and 40-Gbit/s NRZ modulations in the C band. Low-temperature-deposited hydrogen-free SiN waveguides enable us to construct the Mach-Zehnder interferometer on a Si platform.

AB - A Mach-Zehnder modulator with 300-μ m-Iong membrane InGaAsP phase shifters shows V, L of 0.3 Vcm and 40-Gbit/s NRZ modulations in the C band. Low-temperature-deposited hydrogen-free SiN waveguides enable us to construct the Mach-Zehnder interferometer on a Si platform.

UR - http://www.scopus.com/inward/record.url?scp=85063219366&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85063219366&partnerID=8YFLogxK

U2 - 10.1109/ECOC.2018.8535448

DO - 10.1109/ECOC.2018.8535448

M3 - Conference contribution

AN - SCOPUS:85063219366

T3 - European Conference on Optical Communication, ECOC

BT - 2018 European Conference on Optical Communication, ECOC 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2018 European Conference on Optical Communication, ECOC 2018

Y2 - 23 September 2018 through 27 September 2018

ER -

Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform

Abstract

Publication series

Conference

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this