Hexagonal boron nitride grown by MOVPE

Y. Kobayashi*, T. Akasaka, T. Makimoto

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

61 Citations (Scopus)


Hexagonal boron nitride (h-BN) has a potential for optical device applications in the deep ultraviolet spectral region. For several decades, only amorphous and turbostratic boron nitride (BN) films had been grown by chemical vapor deposition and metalorganic vapor phase epitaxy. By introducing flow-rate modulation epitaxy (FME), which enables us to reduce parasitic reactions and lower the optimal growth temperature, we have succeeded in growing single-phase h-BN epitaxial films on nearly lattice-matched (1 1 1) Ni substrates. The h-BN epitaxial films exhibit near-band-gap ultraviolet luminescence at a wavelength of 227 nm in cathodoluminescence at room temperature. The combination of FME and the lattice-matched substrate paves the way for the epitaxial growth of high-quality h-BN.

Original languageEnglish
Pages (from-to)5048-5052
Number of pages5
JournalJournal of Crystal Growth
Issue number23
Publication statusPublished - 2008 Nov 15
Externally publishedYes


  • A3. Low press. metalorganic vapor phase epitaxy
  • B1. Nitrides
  • B2. Semiconducting III-V materials

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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