Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer

Eiji Iwase; Hiroaki Onoe; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2008.4443606

Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer

Eiji Iwase^*, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

12 Citations (Scopus)

Abstract

This paper reports complex three-dimensional (3-D) MEMS devices (polydimethylsiloxane) fabricated on PDMS by a parts-transfer method. Our target size of parts is 100-μm-order in our parts-transfer method. First, we evaluate the transfer yield and the positioning accuracy. Secondly, we assemble a hidden vertical comb-drive actuator, including comb-electrodes and a support beam underneath its upper plate. Finally, we measure the drive characteristics of the actuator. Our actuators are the first demonstration of fabricating movable MEMS devices by parts-transfer technique. The demonstration indicates that complex 3-D MEMS devices with movable mechanical functions can be fabricated simply using our method.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	116-119
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443606
Publication status	Published - 2008 Sept 1
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 2008 Jan 13 → 2008 Jan 17

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	08/1/13 → 08/1/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2008.4443606

Cite this

Iwase, E., Onoe, H., Matsumoto, K., & Shimoyama, I. (2008). Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 116-119). Article 4443606 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443606

Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer. / Iwase, Eiji; Onoe, Hiroaki; Matsumoto, Kiyoshi et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 116-119 4443606 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Iwase, E, Onoe, H, Matsumoto, K & Shimoyama, I 2008, Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443606, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 116-119, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443606

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abstract = "This paper reports complex three-dimensional (3-D) MEMS devices (polydimethylsiloxane) fabricated on PDMS by a parts-transfer method. Our target size of parts is 100-μm-order in our parts-transfer method. First, we evaluate the transfer yield and the positioning accuracy. Secondly, we assemble a hidden vertical comb-drive actuator, including comb-electrodes and a support beam underneath its upper plate. Finally, we measure the drive characteristics of the actuator. Our actuators are the first demonstration of fabricating movable MEMS devices by parts-transfer technique. The demonstration indicates that complex 3-D MEMS devices with movable mechanical functions can be fabricated simply using our method.",

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AB - This paper reports complex three-dimensional (3-D) MEMS devices (polydimethylsiloxane) fabricated on PDMS by a parts-transfer method. Our target size of parts is 100-μm-order in our parts-transfer method. First, we evaluate the transfer yield and the positioning accuracy. Secondly, we assemble a hidden vertical comb-drive actuator, including comb-electrodes and a support beam underneath its upper plate. Finally, we measure the drive characteristics of the actuator. Our actuators are the first demonstration of fabricating movable MEMS devices by parts-transfer technique. The demonstration indicates that complex 3-D MEMS devices with movable mechanical functions can be fabricated simply using our method.

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Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer

Abstract

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