High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C

Takahiko Yanagitani; Katsuyoshi Katada; Masashi Suzuki; Kiyotaka Wasa

doi:10.1109/FCS.2014.6859872

High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C

Takahiko Yanagitani^*, Katsuyoshi Katada, Masashi Suzuki, Kiyotaka Wasa

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Citations (Scopus)

Abstract

A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO₃film was demonstrated. Thickness extensional mode electromechanical coupling coefficient k_tof the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high k_tof 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high k_tof 0.42 was also observed in thick PbTiO₃film (with 2.8 μm) at 550 °C.

Original language	English
Title of host publication	IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781479949168
DOIs	https://doi.org/10.1109/FCS.2014.6859872
Publication status	Published - 2014
Externally published	Yes
Event	2014 IEEE International Frequency Control Symposium, IFCS 2014 - Taipei, Taiwan, Province of China Duration: 2014 May 19 → 2014 May 22

Publication series

Name	IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings

Other

Other	2014 IEEE International Frequency Control Symposium, IFCS 2014
Country/Territory	Taiwan, Province of China
City	Taipei
Period	14/5/19 → 14/5/22

Keywords

(key words)
Electromechanical coupling coefficient
High temperature piezoelectric material
Shift of Curie temperature
Thick epitaxial PZT film

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10.1109/FCS.2014.6859872

Cite this

Yanagitani, T., Katada, K., Suzuki, M., & Wasa, K. (2014). High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C. In IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings Article 6859872 (IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings). IEEE Computer Society. https://doi.org/10.1109/FCS.2014.6859872

High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C. / Yanagitani, Takahiko; Katada, Katsuyoshi; Suzuki, Masashi et al.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE Computer Society, 2014. 6859872 (IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yanagitani, T, Katada, K, Suzuki, M & Wasa, K 2014, High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C. in IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings., 6859872, IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings, IEEE Computer Society, 2014 IEEE International Frequency Control Symposium, IFCS 2014, Taipei, Taiwan, Province of China, 14/5/19. https://doi.org/10.1109/FCS.2014.6859872

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title = "High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C",

abstract = "A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO3film was demonstrated. Thickness extensional mode electromechanical coupling coefficient ktof the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high ktof 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high ktof 0.42 was also observed in thick PbTiO3film (with 2.8 μm) at 550 °C.",

keywords = "(key words), Electromechanical coupling coefficient, High temperature piezoelectric material, Shift of Curie temperature, Thick epitaxial PZT film",

author = "Takahiko Yanagitani and Katsuyoshi Katada and Masashi Suzuki and Kiyotaka Wasa",

year = "2014",

doi = "10.1109/FCS.2014.6859872",

language = "English",

isbn = "9781479949168",

series = "IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings",

publisher = "IEEE Computer Society",

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AU - Yanagitani, Takahiko

AU - Katada, Katsuyoshi

AU - Suzuki, Masashi

AU - Wasa, Kiyotaka

PY - 2014

Y1 - 2014

N2 - A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO3film was demonstrated. Thickness extensional mode electromechanical coupling coefficient ktof the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high ktof 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high ktof 0.42 was also observed in thick PbTiO3film (with 2.8 μm) at 550 °C.

AB - A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO3film was demonstrated. Thickness extensional mode electromechanical coupling coefficient ktof the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high ktof 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high ktof 0.42 was also observed in thick PbTiO3film (with 2.8 μm) at 550 °C.

KW - (key words)

KW - Electromechanical coupling coefficient

KW - High temperature piezoelectric material

KW - Shift of Curie temperature

KW - Thick epitaxial PZT film

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T3 - IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings

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High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C

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