High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications

Hiroyuki Kudo*, Takahiro Arakawa, Shinichiro Ohtsuka, Toshiyuki Izumi, Shuichi Shoji, Hirotaka Sato, Hideomi Kobayashi, Kentaro Mori, Takayuki Homma, Tetsuya Osaka, Naoko Iyomoto, Ryuichi Fujimoto, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Tai Oshima, Kazuo Futamoto, Yoh Takei, Taro Ichitsubo, Tamayuki Fujimori, Yoshitaka IshisakiUmeyo Morita, Takeo Koga, Keisuke Shinozaki, Kousuke Sato, Takaya Ohashi, Yoshikatsu Kuroda, Mitsunobu Onishi, Kunio Otake, Fumiaki Beppu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.

Original languageEnglish
Pages (from-to)1190-1195
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number3
Publication statusPublished - 2004 Mar


  • Array
  • Calorimeter
  • Electrodeposition
  • TES
  • X-ray spectrometer

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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