High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications

Hiroyuki Kudo; Takahiro Arakawa; Shinichiro Ohtsuka; Toshiyuki Izumi; Shuichi Shoji; Hirotaka Sato; Hideomi Kobayashi; Kentaro Mori; Takayuki Homma; Tetsuya Osaka; Naoko Iyomoto; Ryuichi Fujimoto; Kazuhisa Mitsuda; Noriko Y. Yamasaki; Tai Oshima; Kazuo Futamoto; Yoh Takei; Taro Ichitsubo; Tamayuki Fujimori; Yoshitaka Ishisaki; Umeyo Morita; Takeo Koga; Keisuke Shinozaki; Kousuke Sato; Takaya Ohashi; Yoshikatsu Kuroda; Mitsunobu Onishi; Kunio Otake; Fumiaki Beppu

doi:10.1143/JJAP.43.1190

High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications

Hiroyuki Kudo^*, Takahiro Arakawa, Shinichiro Ohtsuka, Toshiyuki Izumi, Shuichi Shoji, Hirotaka Sato, Hideomi Kobayashi, Kentaro Mori, Takayuki Homma, Tetsuya Osaka, Naoko Iyomoto, Ryuichi Fujimoto, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Tai Oshima, Kazuo Futamoto, Yoh Takei, Taro Ichitsubo, Tamayuki Fujimori, Yoshitaka IshisakiUmeyo Morita, Takeo Koga, Keisuke Shinozaki, Kousuke Sato, Takaya Ohashi, Yoshikatsu Kuroda, Mitsunobu Onishi, Kunio Otake, Fumiaki Beppu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.

Original language	English
Pages (from-to)	1190-1195
Number of pages	6
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	43
Issue number	3
DOIs	https://doi.org/10.1143/JJAP.43.1190
Publication status	Published - 2004 Mar

Keywords

Array
Calorimeter
Electrodeposition
TES
X-ray spectrometer

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.43.1190

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Kudo, H., Arakawa, T., Ohtsuka, S., Izumi, T., Shoji, S., Sato, H., Kobayashi, H., Mori, K., Homma, T., Osaka, T., Iyomoto, N., Fujimoto, R., Mitsuda, K., Yamasaki, N. Y., Oshima, T., Futamoto, K., Takei, Y., Ichitsubo, T., Fujimori, T., ... Beppu, F. (2004). High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 43(3), 1190-1195. https://doi.org/10.1143/JJAP.43.1190

Kudo, H, Arakawa, T, Ohtsuka, S, Izumi, T, Shoji, S, Sato, H, Kobayashi, H, Mori, K, Homma, T, Osaka, T, Iyomoto, N, Fujimoto, R, Mitsuda, K, Yamasaki, NY, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Ishisaki, Y, Morita, U, Koga, T, Shinozaki, K, Sato, K, Ohashi, T, Kuroda, Y, Onishi, M, Otake, K & Beppu, F 2004, 'High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 43, no. 3, pp. 1190-1195. https://doi.org/10.1143/JJAP.43.1190

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abstract = "An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.",

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author = "Hiroyuki Kudo and Takahiro Arakawa and Shinichiro Ohtsuka and Toshiyuki Izumi and Shuichi Shoji and Hirotaka Sato and Hideomi Kobayashi and Kentaro Mori and Takayuki Homma and Tetsuya Osaka and Naoko Iyomoto and Ryuichi Fujimoto and Kazuhisa Mitsuda and Yamasaki, {Noriko Y.} and Tai Oshima and Kazuo Futamoto and Yoh Takei and Taro Ichitsubo and Tamayuki Fujimori and Yoshitaka Ishisaki and Umeyo Morita and Takeo Koga and Keisuke Shinozaki and Kousuke Sato and Takaya Ohashi and Yoshikatsu Kuroda and Mitsunobu Onishi and Kunio Otake and Fumiaki Beppu",

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doi = "10.1143/JJAP.43.1190",

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AU - Kudo, Hiroyuki

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AU - Ohtsuka, Shinichiro

AU - Izumi, Toshiyuki

AU - Shoji, Shuichi

AU - Sato, Hirotaka

AU - Kobayashi, Hideomi

AU - Mori, Kentaro

AU - Homma, Takayuki

AU - Osaka, Tetsuya

AU - Iyomoto, Naoko

AU - Fujimoto, Ryuichi

AU - Mitsuda, Kazuhisa

AU - Yamasaki, Noriko Y.

AU - Oshima, Tai

AU - Futamoto, Kazuo

AU - Takei, Yoh

AU - Ichitsubo, Taro

AU - Fujimori, Tamayuki

AU - Ishisaki, Yoshitaka

AU - Morita, Umeyo

AU - Koga, Takeo

AU - Shinozaki, Keisuke

AU - Sato, Kousuke

AU - Ohashi, Takaya

AU - Kuroda, Yoshikatsu

AU - Onishi, Mitsunobu

AU - Otake, Kunio

AU - Beppu, Fumiaki

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N2 - An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.

AB - An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.

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ER -

High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications

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Keywords

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