High-sensitivity fiber-optic Fabry-Perot interferometer temperature sensor

Xuefeng Li*, Shuo Lin, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional singlemode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1h.

Original languageEnglish
Article number06FL10
JournalJapanese Journal of Applied Physics
Issue number6 PART 2
Publication statusPublished - 2012 Jun

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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