TY - JOUR
T1 - High-sensitivity fiber-optic Fabry-Perot interferometer temperature sensor
AU - Li, Xuefeng
AU - Lin, Shuo
AU - Liang, Jinxing
AU - Oigawa, Hiroshi
AU - Ueda, Toshitsugu
PY - 2012/6
Y1 - 2012/6
N2 - A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional singlemode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1h.
AB - A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional singlemode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1h.
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U2 - 10.1143/JJAP.51.06FL10
DO - 10.1143/JJAP.51.06FL10
M3 - Article
AN - SCOPUS:84863304661
SN - 0021-4922
VL - 51
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 6 PART 2
M1 - 06FL10
ER -