Abstract
A Pt stylus formed at the tip of the electrooptic (EO) probe by a focused ion beam achieves high spatial resolution. The microbalance mechanism fabricated by etching quartz crystal was employed to stabilize the probe position and to minimize the force exerted upon ICs during probe positioning. The sine wave signal was applied to the 0.84 μm wide strip line and measured by the EO probes with and without Pt stylus. The signal is not detected with an EO probe without Pt stylus, while EO probe with Pt stylus measures it with a good S/N ratio since it has a higher spatial resolution.
| Original language | English |
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| Title of host publication | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | IEEE |
| Pages | 38-39 |
| Number of pages | 2 |
| Publication status | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim - Chiba, Jpn Duration: 1997 Jul 14 → 1997 Jul 18 |
Other
| Other | Proceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim |
|---|---|
| City | Chiba, Jpn |
| Period | 97/7/14 → 97/7/18 |
ASJC Scopus subject areas
- Physics and Astronomy(all)