Higher-order shear mode FBAR using polarization-inverted layers of (112̄0) textured ZnO films

Miyamoto Yoshinori; Takahiko Yanagitani; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1109/ULTSYM.2005.1603224

Higher-order shear mode FBAR using polarization-inverted layers of (112̄0) textured ZnO films

Miyamoto Yoshinori^*, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Second-order shear mode FBAR using (1120) textured ZnO film was fabricated. This FBAR contained two ZnO layers with opposite polarizations. Crystallites growth directions of the ZnO layers were clarified by X-ray pole figure analysis. Characteristics of this FBAR were experimentally and theoretically investigated.

Original language	English
Title of host publication	2005 IEEE Ultrasonics Symposium
Pages	1828-1831
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2005.1603224
Publication status	Published - 2005 Dec 1
Externally published	Yes
Event	2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands Duration: 2005 Sept 18 → 2005 Sept 21

Publication series

Name	Proceedings - IEEE Ultrasonics Symposium
Volume	3
ISSN (Print)	1051-0117

Other

Other	2005 IEEE Ultrasonics Symposium
Country/Territory	Netherlands
City	Rotterdam
Period	05/9/18 → 05/9/21

Keywords

(112̄0) textured zinc oxide
Component
Higher order mode FBAR
Polarization-inverted piezoelectric layers
Shear mode

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2005.1603224

Cite this

Yoshinori, M, Yanagitani, T, Matsukawa, M & Watanabe, Y 2005, Higher-order shear mode FBAR using polarization-inverted layers of (112̄0) textured ZnO films. in 2005 IEEE Ultrasonics Symposium., 1603224, Proceedings - IEEE Ultrasonics Symposium, vol. 3, pp. 1828-1831, 2005 IEEE Ultrasonics Symposium, Rotterdam, Netherlands, 05/9/18. https://doi.org/10.1109/ULTSYM.2005.1603224

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abstract = "Second-order shear mode FBAR using (1120) textured ZnO film was fabricated. This FBAR contained two ZnO layers with opposite polarizations. Crystallites growth directions of the ZnO layers were clarified by X-ray pole figure analysis. Characteristics of this FBAR were experimentally and theoretically investigated.",

keywords = "(11{\=2}0) textured zinc oxide, Component, Higher order mode FBAR, Polarization-inverted piezoelectric layers, Shear mode",

author = "Miyamoto Yoshinori and Takahiko Yanagitani and Mami Matsukawa and Yoshiaki Watanabe",

year = "2005",

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language = "English",

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series = "Proceedings - IEEE Ultrasonics Symposium",

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AU - Watanabe, Yoshiaki

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Second-order shear mode FBAR using (1120) textured ZnO film was fabricated. This FBAR contained two ZnO layers with opposite polarizations. Crystallites growth directions of the ZnO layers were clarified by X-ray pole figure analysis. Characteristics of this FBAR were experimentally and theoretically investigated.

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KW - Polarization-inverted piezoelectric layers

KW - Shear mode

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BT - 2005 IEEE Ultrasonics Symposium

T2 - 2005 IEEE Ultrasonics Symposium

Y2 - 18 September 2005 through 21 September 2005

ER -

Higher-order shear mode FBAR using polarization-inverted layers of (112̄0) textured ZnO films

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