Highly efficient electron gun with a single-atom electron source

Tsuyoshi Ishikawa; Tomohiro Urata; Boklae Cho; Eiji Rokuta; Chuhei Oshima; Yoshinori Terui; Hidekazu Saito; Akira Yonezawa; Tien T. Tsong

doi:10.1063/1.2720348

Highly efficient electron gun with a single-atom electron source

Tsuyoshi Ishikawa^*, Tomohiro Urata, Boklae Cho, Eiji Rokuta, Chuhei Oshima, Yoshinori Terui, Hidekazu Saito, Akira Yonezawa, Tien T. Tsong

^*Corresponding author for this work

Waseda University

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

Original language	English
Article number	143120
Journal	Applied Physics Letters
Volume	90
Issue number	14
DOIs	https://doi.org/10.1063/1.2720348
Publication status	Published - 2007

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2720348

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abstract = "The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.",

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AU - Ishikawa, Tsuyoshi

AU - Urata, Tomohiro

AU - Cho, Boklae

AU - Rokuta, Eiji

AU - Oshima, Chuhei

AU - Terui, Yoshinori

AU - Saito, Hidekazu

AU - Yonezawa, Akira

AU - Tsong, Tien T.

PY - 2007

Y1 - 2007

N2 - The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

AB - The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Highly efficient electron gun with a single-atom electron source

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