Impact of heat guide structure on the power generation performance of integrated cavity-free micro thermoelectric generators

K. Kuga*, M. M.H. Mahfuz, T. Matsuki, T. Watanabe

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The performance of a cavity-free micro thermoelectric generator (TEG) consisting of Si nanowires (Si-NWs) is investigated in this research. In the cavity free structure, one side of TEG is heated by a structure of a metal overlayer, called the Heat Guide (HG), to supply heat selectively to specific microregions within the device. Thus, heat energy flows in the perpendicular direction, which forms steep a temperature gradient in the NWs. However, the performance can be varied by varying the thickness of the HG. In this work, the impact of the HG structure of an integrated TEG upon the power generation performance was experimentally demonstrated. Higher metal HG thickness and thick interlayer dielectric (ILD) thickness show higher power generation performance with the integrated device.

Original languageEnglish
Article number02SP74
JournalJapanese journal of applied physics
Volume63
Issue number2
DOIs
Publication statusPublished - 2024 Feb 29

Keywords

  • energy harvesting
  • Si-nanowire
  • thermoelectric generator

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy

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