Improvement in the ion-detection sensitivity of the pressure measurement method using nonresonant laser ionization

K. Kokubun; S. Ichimura; M. Hirata; S. Sekine; A. Kurokawa

doi:10.1016/s0042-207x(97)00038-9

Improvement in the ion-detection sensitivity of the pressure measurement method using nonresonant laser ionization

K. Kokubun^*, S. Ichimura, M. Hirata, S. Sekine, A. Kurokawa

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

In order to increase the ion-detection efficiency of pressure measurement using nonresonant laser ionization method, a Channeltron of aperture 19 mm was used in the ion-detection head and pressure measurement was carried out with H₂. The detection efficiency was increased about 1.5 times compared to a previous result. The volume of the ionization region estimated from the present measurement, 5.8 × 10^-4 mm³, is close to that derived from the direct observation of the ion distribution in the ionization region, 6.4 × 10^-4 mm³.

Original language	English
Pages (from-to)	727-729
Number of pages	3
Journal	Vacuum
Volume	48
Issue number	7-9
DOIs	https://doi.org/10.1016/s0042-207x(97)00038-9
Publication status	Published - 1997 Sept
Externally published	Yes

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

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10.1016/s0042-207x(97)00038-9

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title = "Improvement in the ion-detection sensitivity of the pressure measurement method using nonresonant laser ionization",

abstract = "In order to increase the ion-detection efficiency of pressure measurement using nonresonant laser ionization method, a Channeltron of aperture 19 mm was used in the ion-detection head and pressure measurement was carried out with H2. The detection efficiency was increased about 1.5 times compared to a previous result. The volume of the ionization region estimated from the present measurement, 5.8 × 10-4 mm3, is close to that derived from the direct observation of the ion distribution in the ionization region, 6.4 × 10-4 mm3.",

author = "K. Kokubun and S. Ichimura and M. Hirata and S. Sekine and A. Kurokawa",

year = "1997",

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doi = "10.1016/s0042-207x(97)00038-9",

language = "English",

volume = "48",

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T1 - Improvement in the ion-detection sensitivity of the pressure measurement method using nonresonant laser ionization

AU - Kokubun, K.

AU - Ichimura, S.

AU - Hirata, M.

AU - Sekine, S.

AU - Kurokawa, A.

PY - 1997/9

Y1 - 1997/9

N2 - In order to increase the ion-detection efficiency of pressure measurement using nonresonant laser ionization method, a Channeltron of aperture 19 mm was used in the ion-detection head and pressure measurement was carried out with H2. The detection efficiency was increased about 1.5 times compared to a previous result. The volume of the ionization region estimated from the present measurement, 5.8 × 10-4 mm3, is close to that derived from the direct observation of the ion distribution in the ionization region, 6.4 × 10-4 mm3.

AB - In order to increase the ion-detection efficiency of pressure measurement using nonresonant laser ionization method, a Channeltron of aperture 19 mm was used in the ion-detection head and pressure measurement was carried out with H2. The detection efficiency was increased about 1.5 times compared to a previous result. The volume of the ionization region estimated from the present measurement, 5.8 × 10-4 mm3, is close to that derived from the direct observation of the ion distribution in the ionization region, 6.4 × 10-4 mm3.

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SN - 0042-207X

VL - 48

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EP - 729

JO - Vacuum

JF - Vacuum

IS - 7-9

ER -

Improvement in the ion-detection sensitivity of the pressure measurement method using nonresonant laser ionization

Abstract

ASJC Scopus subject areas

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