Improvement of Electromechanical Coupling Coefficient of Piezoelectric LiNbO3by Doping Praseodymium

Kae Nakamura; Shinya Kudo; Junjun Jia; Takahiko Yanagitani

doi:10.1109/IUS54386.2022.9958265

Improvement of Electromechanical Coupling Coefficient of Piezoelectric LiNbO₃by Doping Praseodymium

Kae Nakamura, Shinya Kudo, Junjun Jia, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The c-axis oriented LiNbO3 (LN) and praseodymium (Pr) doped LN films were fabricated by RF magnetron sputtering. The epitaxial growth of the films was confirmed by the measurement of XRD pole figure. Their electromechanical coupling coefficient k-{t}{2} were estimated by the conversion loss method. The minimum conversion loss for the Pr-LN film was measured to be 14 dB at 1.5 GHz along the film thickness direction. The k-{t}{2} value of Pr - LN film was improved to 2.2% from 0.8% of epitaxial LN film, demonstrating that doping Pr into LN film is a good way of improving the electromechanical coupling coefficient of piezoelectric LN film.

Original language	English
Title of host publication	IUS 2022 - IEEE International Ultrasonics Symposium
Publisher	IEEE Computer Society
ISBN (Electronic)	9781665466578
DOIs	https://doi.org/10.1109/IUS54386.2022.9958265
Publication status	Published - 2022
Event	2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy Duration: 2022 Oct 10 → 2022 Oct 13

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2022-October
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/Territory	Italy
City	Venice
Period	22/10/10 → 22/10/13

Keywords

electromechanical coupling coefficient
epitaxial films
LiNbO

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/IUS54386.2022.9958265

Cite this

Improvement of Electromechanical Coupling Coefficient of Piezoelectric LiNbO₃by Doping Praseodymium. / Nakamura, Kae; Kudo, Shinya; Jia, Junjun et al.
IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Computer Society, 2022. (IEEE International Ultrasonics Symposium, IUS; Vol. 2022-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakamura, K, Kudo, S, Jia, J & Yanagitani, T 2022, Improvement of Electromechanical Coupling Coefficient of Piezoelectric LiNbO₃by Doping Praseodymium. in IUS 2022 - IEEE International Ultrasonics Symposium. IEEE International Ultrasonics Symposium, IUS, vol. 2022-October, IEEE Computer Society, 2022 IEEE International Ultrasonics Symposium, IUS 2022, Venice, Italy, 22/10/10. https://doi.org/10.1109/IUS54386.2022.9958265

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title = "Improvement of Electromechanical Coupling Coefficient of Piezoelectric LiNbO3by Doping Praseodymium",

abstract = "The c-axis oriented LiNbO3 (LN) and praseodymium (Pr) doped LN films were fabricated by RF magnetron sputtering. The epitaxial growth of the films was confirmed by the measurement of XRD pole figure. Their electromechanical coupling coefficient k-{t}{2} were estimated by the conversion loss method. The minimum conversion loss for the Pr-LN film was measured to be 14 dB at 1.5 GHz along the film thickness direction. The k-{t}{2} value of Pr - LN film was improved to 2.2% from 0.8% of epitaxial LN film, demonstrating that doping Pr into LN film is a good way of improving the electromechanical coupling coefficient of piezoelectric LN film.",

keywords = "electromechanical coupling coefficient, epitaxial films, LiNbO",

author = "Kae Nakamura and Shinya Kudo and Junjun Jia and Takahiko Yanagitani",

note = "Funding Information: ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734). Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Ultrasonics Symposium, IUS 2022 ; Conference date: 10-10-2022 Through 13-10-2022",

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N1 - Funding Information: ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734). Publisher Copyright: © 2022 IEEE.

PY - 2022

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N2 - The c-axis oriented LiNbO3 (LN) and praseodymium (Pr) doped LN films were fabricated by RF magnetron sputtering. The epitaxial growth of the films was confirmed by the measurement of XRD pole figure. Their electromechanical coupling coefficient k-{t}{2} were estimated by the conversion loss method. The minimum conversion loss for the Pr-LN film was measured to be 14 dB at 1.5 GHz along the film thickness direction. The k-{t}{2} value of Pr - LN film was improved to 2.2% from 0.8% of epitaxial LN film, demonstrating that doping Pr into LN film is a good way of improving the electromechanical coupling coefficient of piezoelectric LN film.

AB - The c-axis oriented LiNbO3 (LN) and praseodymium (Pr) doped LN films were fabricated by RF magnetron sputtering. The epitaxial growth of the films was confirmed by the measurement of XRD pole figure. Their electromechanical coupling coefficient k-{t}{2} were estimated by the conversion loss method. The minimum conversion loss for the Pr-LN film was measured to be 14 dB at 1.5 GHz along the film thickness direction. The k-{t}{2} value of Pr - LN film was improved to 2.2% from 0.8% of epitaxial LN film, demonstrating that doping Pr into LN film is a good way of improving the electromechanical coupling coefficient of piezoelectric LN film.

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KW - epitaxial films

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