TY - JOUR
T1 - In-channel 3-D micromesh structures using maskless multi-angle exposures and their microfilter application
AU - Sato, Hironobu
AU - Kakinuma, Takayuki
AU - Go, Jeung Sang
AU - Shoji, Shuichi
N1 - Funding Information:
This work was supported by the Japanese Ministry of Education, Culture Sport, Science and Technology Grant-in-Aids for COE Research of Waseda University, Scientific Research Priority Area (B) No.13124209, Scientific Research (B) No.12450167, Japan Society for the Promotion Science Grant-in-Aids for Creative Scientific Research No.13BS0024, “Nanotechnology Support Project” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan and 21COE “Practical Nano-Chemistry” from MEXT, Japan.
PY - 2004/3/1
Y1 - 2004/3/1
N2 - This paper presents a fabrication method of in-channel three-dimensional micromesh structures using conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Number of exposures and irradiation angles decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated using the same Cr pattern on the glass substrate. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of micro total analysis systems (μTAS), the microfilter was fabricated and its filtering property was demonstrated.
AB - This paper presents a fabrication method of in-channel three-dimensional micromesh structures using conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Number of exposures and irradiation angles decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated using the same Cr pattern on the glass substrate. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of micro total analysis systems (μTAS), the microfilter was fabricated and its filtering property was demonstrated.
KW - 3-D micromesh structure
KW - Backside exposure
KW - In-channel microfilter
KW - SU-8
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U2 - 10.1016/j.sna.2003.10.009
DO - 10.1016/j.sna.2003.10.009
M3 - Conference article
AN - SCOPUS:0442280359
SN - 0924-4247
VL - 111
SP - 87
EP - 92
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 1
T2 - Micromechanics Section of Sensors and Actuators, based on
Y2 - 19 January 2003 through 23 January 2003
ER -