Inertial unit for multi-motion detection

Jun Mizuno*, Kay Nottmeyer, Cleopatra Cabuz, Kazuyuki Minami, Takashi Kobayashi, Masayoshi Esashi

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


Monitoring motion parameters are increasingly important in automotive and robotics applications, where cheap sensors are highly desirable. A silicon micromachined structure 0.5X2cm in size was designed and fabricated, which can detect not only translational acceleration, but angular acceleration or rate simultaneously and independently, which has a particular merit since it theoretically allows single point detection of all 6 axis of freedom using only three sensors. This is accomplished by capacitive detection of the displacement and the tilt of the seismic mass, symmetrically suspended by two torsion bars. The expected linear dependencies of the output signal on translational and angular accelerations, as well as quadratic dependency on angular rate could be verified. It is shown, that the dynamic response is improved by vacuum packaging.

Original languageEnglish
JournalSAE Technical Papers
Publication statusPublished - 1996
Externally publishedYes
EventInternational Congress and Exposition - Detroit, MI, United States
Duration: 1996 Feb 261996 Feb 29

ASJC Scopus subject areas

  • Automotive Engineering
  • Safety, Risk, Reliability and Quality
  • Pollution
  • Industrial and Manufacturing Engineering


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