TY - GEN
T1 - Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films
AU - Suzuki, Masashi
AU - Yanagitani, Takahiko
PY - 2010/12/1
Y1 - 2010/12/1
N2 - C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.
AB - C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.
KW - Acoustic properties
KW - AlN
KW - Shadowing effect
KW - Sputtering deposition
KW - c-axis tlted film
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U2 - 10.1109/ULTSYM.2010.5935561
DO - 10.1109/ULTSYM.2010.5935561
M3 - Conference contribution
AN - SCOPUS:80054744552
SN - 9781457703829
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 1478
EP - 1481
BT - 2010 IEEE International Ultrasonics Symposium, IUS 2010
T2 - 2010 IEEE International Ultrasonics Symposium, IUS 2010
Y2 - 11 October 2010 through 14 October 2010
ER -