Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Reiho Amano; Thang Hung Dinh; Atsushi Sasanuma; Goki Arai; Hiroyuki Hara; Yusuke Fujii; Tadashi Hatano; Takeo Ejima; Weihua Jiang; Atsushi Sunahara; Akihiko Takahashi; Daisuke Nakamura; Tatsuo Okada; Kazuyuki Sakaue; Taisuke Miura; Gerry O'Sullivan; Takeshi Higashiguchi

doi:10.7567/JJAP.57.070311

Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Reiho Amano, Thang Hung Dinh, Atsushi Sasanuma, Goki Arai, Hiroyuki Hara, Yusuke Fujii, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Atsushi Sunahara, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Kazuyuki Sakaue, Taisuke Miura, Gerry O'Sullivan, Takeshi Higashiguchi

Waseda Research Institute for Science and Engineering

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO₂) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.

Original language	English
Article number	070311
Journal	Japanese Journal of Applied Physics
Volume	57
Issue number	7
DOIs	https://doi.org/10.7567/JJAP.57.070311
Publication status	Published - 2018 Jul 1

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Hara, H., Fujii, Y., Hatano, T., Ejima, T., Jiang, W., Sunahara, A., Takahashi, A., Nakamura, D., Okada, T., Sakaue, K., Miura, T., O'Sullivan, G., & Higashiguchi, T. (2018). Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas. Japanese Journal of Applied Physics, 57(7), [070311]. https://doi.org/10.7567/JJAP.57.070311

Amano, R, Dinh, TH, Sasanuma, A, Arai, G, Hara, H, Fujii, Y, Hatano, T, Ejima, T, Jiang, W, Sunahara, A, Takahashi, A, Nakamura, D, Okada, T, Sakaue, K, Miura, T, O'Sullivan, G & Higashiguchi, T 2018, 'Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas', Japanese Journal of Applied Physics, vol. 57, no. 7, 070311. https://doi.org/10.7567/JJAP.57.070311

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abstract = "We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.",

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AU - Amano, Reiho

AU - Dinh, Thang Hung

AU - Sasanuma, Atsushi

AU - Arai, Goki

AU - Hara, Hiroyuki

AU - Fujii, Yusuke

AU - Hatano, Tadashi

AU - Ejima, Takeo

AU - Jiang, Weihua

AU - Sunahara, Atsushi

AU - Takahashi, Akihiko

AU - Nakamura, Daisuke

AU - Okada, Tatsuo

AU - Sakaue, Kazuyuki

AU - Miura, Taisuke

AU - O'Sullivan, Gerry

AU - Higashiguchi, Takeshi

PY - 2018/7/1

Y1 - 2018/7/1

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AB - We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.

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Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

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