@inproceedings{8e6438c8f8da4292906cd3378a84dd5c,
title = "Integrated micro chamber for living cell analysis with negligible dead volume sample injector",
abstract = "We develop the micro chamber for real-time monitoring of living cell. It is integrated with an extremely low dead volume sample injector. The chamber was fabricated by the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE. The reproducible sample injection of the order of 1 nL is performed. Biological cell culture of HeLa is also demonstrated in a prototype device.",
keywords = "Biological cells, Bonding, Etching, Filters, Laboratories, Monitoring, Polymers, Prototypes, System-on-a-chip, Valves",
author = "M. Kanai and H. Abe and T. Munaka and Y. Fujiyama and D. Uchida and A. Yamayoshi and H. Nakanishi and A. Murakami and S. Shoji",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215309",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "288--291",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}