TY - JOUR
T1 - Intermixing of InP-based quantum dots and application to micro-ring resonator wavelength-selective filter for photonic integrated devices
AU - Matsumoto, Atsushi
AU - Matsushita, Asuka
AU - Takei, Yuki
AU - Akahane, Kouichi
AU - Matsushima, Yuichi
AU - Ishikawa, Hiroshi
AU - Utaka, Katsuyuki
N1 - Publisher Copyright:
© 2014 The Japan Society of Applied Physics.
Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 2014/9/1
Y1 - 2014/9/1
N2 - In this study, we investigated quantum dot intermixing (QDI) for InAs/InGaAlAs highly stacked QDs on an InP(311)B substrate with low-temperature annealing at 650 °C in order to realize integrated photonic devices with QDs and passive waveguides. In particular, we adopted the method of introducing point defects by ICP-RIE to realize a blue shift of the PL peak wavelength by about 150 nm. Moreover, we successfully fabricated double micro-ring resonators by QDI. The output power contrasts of the devices were found to be 9.0 and 8.6 dB for TE and TM modes, respectively.
AB - In this study, we investigated quantum dot intermixing (QDI) for InAs/InGaAlAs highly stacked QDs on an InP(311)B substrate with low-temperature annealing at 650 °C in order to realize integrated photonic devices with QDs and passive waveguides. In particular, we adopted the method of introducing point defects by ICP-RIE to realize a blue shift of the PL peak wavelength by about 150 nm. Moreover, we successfully fabricated double micro-ring resonators by QDI. The output power contrasts of the devices were found to be 9.0 and 8.6 dB for TE and TM modes, respectively.
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U2 - 10.7567/APEX.7.092801
DO - 10.7567/APEX.7.092801
M3 - Article
AN - SCOPUS:84907029482
SN - 1882-0778
VL - 7
JO - Applied Physics Express
JF - Applied Physics Express
IS - 9
M1 - 092801
ER -