INTERPRETATION OF QUANTITATIVE ANALYSIS OF ARTHUR AND LePORE FOR AlxGa1 - xAs USING AES.

S. Ichimura; M. Aratama; R. Shimizu

doi:10.1116/1.570695

INTERPRETATION OF QUANTITATIVE ANALYSIS OF ARTHUR AND LePORE FOR Al_xGa_{1 -} _xAs USING AES.

S. Ichimura^*, M. Aratama, R. Shimizu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A Monte Carlo simulation approach was applied for an interpretation of quantitative analysis using AES. The theoretical calculation has revealed that the shape of the energy distributions of backscattered electrons hardly changes as concentration (x) of Al//xGa//1// minus //xAs changes from x equals 0 to 1 and this leads to the linearity observed by J. R. Arthur and J. J. LePore.

Original language	English
Pages (from-to)	34-36
Number of pages	3
Journal	Journal of vacuum science & technology
Volume	18
Issue number	1
DOIs	https://doi.org/10.1116/1.570695
Publication status	Published - 1981
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)

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title = "INTERPRETATION OF QUANTITATIVE ANALYSIS OF ARTHUR AND LePORE FOR AlxGa1 - xAs USING AES.",

abstract = "A Monte Carlo simulation approach was applied for an interpretation of quantitative analysis using AES. The theoretical calculation has revealed that the shape of the energy distributions of backscattered electrons hardly changes as concentration (x) of Al//xGa//1// minus //xAs changes from x equals 0 to 1 and this leads to the linearity observed by J. R. Arthur and J. J. LePore.",

author = "S. Ichimura and M. Aratama and R. Shimizu",

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AB - A Monte Carlo simulation approach was applied for an interpretation of quantitative analysis using AES. The theoretical calculation has revealed that the shape of the energy distributions of backscattered electrons hardly changes as concentration (x) of Al//xGa//1// minus //xAs changes from x equals 0 to 1 and this leads to the linearity observed by J. R. Arthur and J. J. LePore.

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INTERPRETATION OF QUANTITATIVE ANALYSIS OF ARTHUR AND LePORE FOR Al_xGa_{1 -} _xAs USING AES.

Abstract

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