TY - GEN
T1 - Investigation of Morphotropic Phase Boundary in Sputter-Grown Pb(Zr x , Ti 1-x )03 Epitaxial Films
AU - Noda, Ryuta
AU - Shimidzu, Takahiro
AU - Wasa, Kiyotaka
AU - Yanagitani, Takahiko
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/17
Y1 - 2018/12/17
N2 - Pb(Zrx, Ti1-x)03 (PZT)ceramics display the morphotropic phase boundary (MPB)around x=0.53. In general, PZT ceramics show the anomalously high piezoelectricity and dielectric constant near the MPB. However, PbTiO3 sputter-epitaxial films at x=0 showed higher kt2 than PZT near the MPB in our previous studies, with good reproducibility. In this study, in order to demonstrate that PZT sputter-epitaxial films do not display MPB (phase transition), we measured lattice constant, kt2, dielectric constant and coercive field as a function of x (Zr concentration). As a result, the phase transition was not observed in PZT sputter-epitaxial films. Such phenomena observed in sputter-epitaxial films may be attributed to the damage due to the negative oxygen ion bombardment on the films.
AB - Pb(Zrx, Ti1-x)03 (PZT)ceramics display the morphotropic phase boundary (MPB)around x=0.53. In general, PZT ceramics show the anomalously high piezoelectricity and dielectric constant near the MPB. However, PbTiO3 sputter-epitaxial films at x=0 showed higher kt2 than PZT near the MPB in our previous studies, with good reproducibility. In this study, in order to demonstrate that PZT sputter-epitaxial films do not display MPB (phase transition), we measured lattice constant, kt2, dielectric constant and coercive field as a function of x (Zr concentration). As a result, the phase transition was not observed in PZT sputter-epitaxial films. Such phenomena observed in sputter-epitaxial films may be attributed to the damage due to the negative oxygen ion bombardment on the films.
KW - Epitaxial film
KW - MPB
KW - PZT
KW - Sputtering
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U2 - 10.1109/ULTSYM.2018.8580154
DO - 10.1109/ULTSYM.2018.8580154
M3 - Conference contribution
AN - SCOPUS:85060592451
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2018 IEEE International Ultrasonics Symposium, IUS 2018
PB - IEEE Computer Society
T2 - 2018 IEEE International Ultrasonics Symposium, IUS 2018
Y2 - 22 October 2018 through 25 October 2018
ER -