Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

Yumi Hayashi; Hiroaki Yamazaki; Daiki Ono; Kei Masunishi; Tamio Ikehashi

doi:10.1016/j.ijhydene.2018.03.149

Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

Yumi Hayashi^*, Hiroaki Yamazaki, Daiki Ono, Kei Masunishi, Tamio Ikehashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05 vol% to 4.0 vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications.

Original language	English
Pages (from-to)	9438-9445
Number of pages	8
Journal	International Journal of Hydrogen Energy
Volume	43
Issue number	19
DOIs	https://doi.org/10.1016/j.ijhydene.2018.03.149
Publication status	Published - 2018 May 10
Externally published	Yes

Keywords

Hydrogen sensor
MEMS
Metallic glass
PdCuSi
Strain

ASJC Scopus subject areas

Renewable Energy, Sustainability and the Environment
Fuel Technology
Condensed Matter Physics
Energy Engineering and Power Technology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.ijhydene.2018.03.149

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title = "Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors",

abstract = "In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05 vol% to 4.0 vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications.",

keywords = "Hydrogen sensor, MEMS, Metallic glass, PdCuSi, Strain",

author = "Yumi Hayashi and Hiroaki Yamazaki and Daiki Ono and Kei Masunishi and Tamio Ikehashi",

note = "Funding Information: The authors would like to thank Hideki Shibata and Yoshiaki Sugizaki for continuous supports and encouragements. A part of this study was supported by NIMS Nanofabrication Platform in Nanotechnology Platform Project sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. Publisher Copyright: {\textcopyright} 2018 Hydrogen Energy Publications LLC",

year = "2018",

month = may,

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doi = "10.1016/j.ijhydene.2018.03.149",

language = "English",

volume = "43",

pages = "9438--9445",

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T1 - Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

AU - Hayashi, Yumi

AU - Yamazaki, Hiroaki

AU - Ono, Daiki

AU - Masunishi, Kei

AU - Ikehashi, Tamio

N1 - Funding Information: The authors would like to thank Hideki Shibata and Yoshiaki Sugizaki for continuous supports and encouragements. A part of this study was supported by NIMS Nanofabrication Platform in Nanotechnology Platform Project sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. Publisher Copyright: © 2018 Hydrogen Energy Publications LLC

PY - 2018/5/10

Y1 - 2018/5/10

N2 - In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05 vol% to 4.0 vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications.

AB - In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05 vol% to 4.0 vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications.

KW - Hydrogen sensor

KW - MEMS

KW - Metallic glass

KW - PdCuSi

KW - Strain

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M3 - Article

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Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

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