Investigation on the hardness and morphology of Be-Cu for probing Al layers

M. Saito; G. Kimoto; T. Homma

doi:10.1149/1.3583515

Investigation on the hardness and morphology of Be-Cu for probing Al layers

M. Saito^*, G. Kimoto, T. Homma

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this study, we evaluate the hardness and morphology of Al layers, which are constructed using Al / Si and alumina / Al / Si. The depth of the hollow in the Al sample, which has native oxide, was measured as 0.5 μm using a Be-Cu probe under the applied force of 10 mN. The relationship between the applied force and the displacement can be explained by the Hertzian theory. In the case of alumina (20 nm, 50 nm) / Al / Si, the hollows were smaller than those predicted by the Hertzian theory. Cross-sectional observations revealed that the Al layer under alumina was deformed vertically and laterally. It was concluded that the breaking of alumina was induced by the deformation of Al.

Original language	English
Title of host publication	Nanotechnology (General) - 218th ECS Meeting
Publisher	Electrochemical Society Inc.
Pages	65-72
Number of pages	8
Edition	38
ISBN (Electronic)	9781566778961
ISBN (Print)	9781607682486
DOIs	https://doi.org/10.1149/1.3583515
Publication status	Published - 2010
Event	Nanotechnology General Session - 218th ECS Meeting - Las Vegas, NV, United States Duration: 2010 Oct 10 → 2010 Oct 15

Publication series

Name	ECS Transactions
Number	38
Volume	33
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Conference

Conference	Nanotechnology General Session - 218th ECS Meeting
Country/Territory	United States
City	Las Vegas, NV
Period	10/10/10 → 10/10/15

ASJC Scopus subject areas

Engineering(all)

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10.1149/1.3583515

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Saito, M, Kimoto, G & Homma, T 2010, Investigation on the hardness and morphology of Be-Cu for probing Al layers. in Nanotechnology (General) - 218th ECS Meeting. 38 edn, ECS Transactions, no. 38, vol. 33, Electrochemical Society Inc., pp. 65-72, Nanotechnology General Session - 218th ECS Meeting, Las Vegas, NV, United States, 10/10/10. https://doi.org/10.1149/1.3583515

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title = "Investigation on the hardness and morphology of Be-Cu for probing Al layers",

abstract = "In this study, we evaluate the hardness and morphology of Al layers, which are constructed using Al / Si and alumina / Al / Si. The depth of the hollow in the Al sample, which has native oxide, was measured as 0.5 μm using a Be-Cu probe under the applied force of 10 mN. The relationship between the applied force and the displacement can be explained by the Hertzian theory. In the case of alumina (20 nm, 50 nm) / Al / Si, the hollows were smaller than those predicted by the Hertzian theory. Cross-sectional observations revealed that the Al layer under alumina was deformed vertically and laterally. It was concluded that the breaking of alumina was induced by the deformation of Al.",

author = "M. Saito and G. Kimoto and T. Homma",

year = "2010",

doi = "10.1149/1.3583515",

language = "English",

isbn = "9781607682486",

series = "ECS Transactions",

publisher = "Electrochemical Society Inc.",

number = "38",

pages = "65--72",

booktitle = "Nanotechnology (General) - 218th ECS Meeting",

edition = "38",

note = "Nanotechnology General Session - 218th ECS Meeting ; Conference date: 10-10-2010 Through 15-10-2010",

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TY - GEN

T1 - Investigation on the hardness and morphology of Be-Cu for probing Al layers

AU - Saito, M.

AU - Kimoto, G.

AU - Homma, T.

PY - 2010

Y1 - 2010

N2 - In this study, we evaluate the hardness and morphology of Al layers, which are constructed using Al / Si and alumina / Al / Si. The depth of the hollow in the Al sample, which has native oxide, was measured as 0.5 μm using a Be-Cu probe under the applied force of 10 mN. The relationship between the applied force and the displacement can be explained by the Hertzian theory. In the case of alumina (20 nm, 50 nm) / Al / Si, the hollows were smaller than those predicted by the Hertzian theory. Cross-sectional observations revealed that the Al layer under alumina was deformed vertically and laterally. It was concluded that the breaking of alumina was induced by the deformation of Al.

AB - In this study, we evaluate the hardness and morphology of Al layers, which are constructed using Al / Si and alumina / Al / Si. The depth of the hollow in the Al sample, which has native oxide, was measured as 0.5 μm using a Be-Cu probe under the applied force of 10 mN. The relationship between the applied force and the displacement can be explained by the Hertzian theory. In the case of alumina (20 nm, 50 nm) / Al / Si, the hollows were smaller than those predicted by the Hertzian theory. Cross-sectional observations revealed that the Al layer under alumina was deformed vertically and laterally. It was concluded that the breaking of alumina was induced by the deformation of Al.

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BT - Nanotechnology (General) - 218th ECS Meeting

PB - Electrochemical Society Inc.

T2 - Nanotechnology General Session - 218th ECS Meeting

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ER -

Investigation on the hardness and morphology of Be-Cu for probing Al layers

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