Abstract
A new simple method of exposing the lambda /4-phase-shifted corrugation for DFB-LD was successfully developed. It was achieved by using an original spatial phase modulating mask. The mask fabrication process was developed by selective deposition of SiO//2 thick film on a quartz substrate.
Original language | English |
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Title of host publication | Unknown Host Publication Title |
Place of Publication | Genoa, Italy |
Publisher | Istituto Int delle Comunicazioni |
Pages | 25-28 |
Number of pages | 4 |
Volume | 1 |
Publication status | Published - 1985 |
Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)