LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING.

Hiroshi Tanino; Koichiro Hoh; Masahiro Hirata; Shirigo Ichimura; Nobufumi Atoda; Takio Tomimiasu; Tsutomu Noguchi; Suguru Sugiyama; Tetsuo Yamazaki

LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING.

Hiroshi Tanino^*, Koichiro Hoh, Masahiro Hirata, Shirigo Ichimura, Nobufumi Atoda, Takio Tomimiasu, Tsutomu Noguchi, Suguru Sugiyama, Tetsuo Yamazaki

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Conference on Solid State Devices and Materials
Publisher	Business Cent for Academic Soc Japan
Pages	30-31
Number of pages	2
ISBN (Print)	4930813042
Publication status	Published - 1983
Externally published	Yes

Publication series

Name	Conference on Solid State Devices and Materials

ASJC Scopus subject areas

Engineering(all)

Cite this

Tanino, H., Hoh, K., Hirata, M., Ichimura, S., Atoda, N., Tomimiasu, T., Noguchi, T., Sugiyama, S., & Yamazaki, T. (1983). LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING. In Conference on Solid State Devices and Materials (pp. 30-31). (Conference on Solid State Devices and Materials). Business Cent for Academic Soc Japan.

LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING. / Tanino, Hiroshi; Hoh, Koichiro; Hirata, Masahiro et al.
Conference on Solid State Devices and Materials. Business Cent for Academic Soc Japan, 1983. p. 30-31 (Conference on Solid State Devices and Materials).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tanino, H, Hoh, K, Hirata, M, Ichimura, S, Atoda, N, Tomimiasu, T, Noguchi, T, Sugiyama, S & Yamazaki, T 1983, LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING. in Conference on Solid State Devices and Materials. Conference on Solid State Devices and Materials, Business Cent for Academic Soc Japan, pp. 30-31.

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title = "LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING.",

author = "Hiroshi Tanino and Koichiro Hoh and Masahiro Hirata and Shirigo Ichimura and Nobufumi Atoda and Takio Tomimiasu and Tsutomu Noguchi and Suguru Sugiyama and Tetsuo Yamazaki",

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AU - Tanino, Hiroshi

AU - Hoh, Koichiro

AU - Hirata, Masahiro

AU - Ichimura, Shirigo

AU - Atoda, Nobufumi

AU - Tomimiasu, Takio

AU - Noguchi, Tsutomu

AU - Sugiyama, Suguru

AU - Yamazaki, Tetsuo

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M3 - Conference contribution

AN - SCOPUS:0020991895

SN - 4930813042

T3 - Conference on Solid State Devices and Materials

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EP - 31

BT - Conference on Solid State Devices and Materials

PB - Business Cent for Academic Soc Japan

ER -

LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING.

Publication series

ASJC Scopus subject areas

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