Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira; Tetsuro Segawa; Kenji Nagai; Katsuyuki Utaka; Masashi Nakao

doi:10.1143/jjap.41.1085

Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira^*, Tetsuro Segawa, Kenji Nagai, Katsuyuki Utaka, Masashi Nakao

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

Original language	English
Pages (from-to)	1085-1089
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	41
Issue number	2 B
DOIs	https://doi.org/10.1143/jjap.41.1085
Publication status	Published - 2002 Feb

Keywords

Laser holography
Milling
Photonic crystal
Sub-wavelength structure
Wet etching

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.41.1085

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title = "Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography",

abstract = "We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.",

keywords = "Laser holography, Milling, Photonic crystal, Sub-wavelength structure, Wet etching",

author = "Tomoaki Ohira and Tetsuro Segawa and Kenji Nagai and Katsuyuki Utaka and Masashi Nakao",

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pages = "1085--1089",

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T1 - Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

AU - Ohira, Tomoaki

AU - Segawa, Tetsuro

AU - Nagai, Kenji

AU - Utaka, Katsuyuki

AU - Nakao, Masashi

PY - 2002/2

Y1 - 2002/2

N2 - We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

AB - We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

KW - Laser holography

KW - Milling

KW - Photonic crystal

KW - Sub-wavelength structure

KW - Wet etching

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 2 B

ER -

Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Abstract

Keywords

ASJC Scopus subject areas

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