R. Ohtaki*, Y. Matsushita, M. Tajima

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Relationship between oxide precipitates, which are one of the important microdefects in typical CZ Si wafers, and a minority carrier recombination lifetime was studied in detail. It was found that the critical size of the oxide precipitates, which act as lifetime killers, is approximately 200-300 A in diameter, and that the lifetime is a strong function of the density of precipitates. If the size is smaller than the critical size, precipitates will not work as lifetime killers, no matter how high their density is. Furthermore, it was found that the annealing at 450 degree C for 64 hours produces a new deep level, which makes the lifetime remarkably small.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
PublisherMetallurgical Soc of AIME
Number of pages7
ISBN (Print)0895204851
Publication statusPublished - 1985
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)


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