| Original language | English |
|---|---|
| Pages | 611-612 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 1983 |
| Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)
LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.
Koichiro Hoh*, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki
*Corresponding author for this work
Research output: Contribution to conference › Paper › peer-review
2
Citations
(Scopus)