Low temperature Au-Au bonding with VUV/O 3 treatment

Akiko Okada*, Masatsugu Nimura, Naoko Unami, Akitsu Shigetou, Hirokazu Noma, Katsuyuki Sakuma, Jun Mizuno, Shuichi Shoji

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Engineering & Materials Science