Abstract
The direct bonding between polyether ether ketone (PEEK) and Pt was feasible at low temperature of 150 oC through vapor assisted VUV treatment. This technology was expected to be applied in future body implantable devices for medical applications. The carboxyl functional groups were created on the PEEK surface during the vapor assisted VUV treatment, as well as the hydrate compound was formed on Pt surface. The highest bonding strength and surface release energy reached 1.15 MPa and 4.6 × 10-1 N/m, respectively, which was considered strong and comparable with conventional PEEK-based direct bonding.
Original language | English |
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Title of host publication | Proceedings - ECTC 2016: 66th Electronic Components and Technology Conference |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 2541-2546 |
Number of pages | 6 |
Volume | 2016-August |
ISBN (Electronic) | 9781509012039 |
DOIs | |
Publication status | Published - 2016 Aug 16 |
Externally published | Yes |
Event | 66th IEEE Electronic Components and Technology Conference, ECTC 2016 - Las Vegas, United States Duration: 2016 May 31 → 2016 Jun 3 |
Other
Other | 66th IEEE Electronic Components and Technology Conference, ECTC 2016 |
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Country/Territory | United States |
City | Las Vegas |
Period | 16/5/31 → 16/6/3 |
Keywords
- Hybrid bonding
- Low temperature bonding
- PEEK
- Surface modification
- Vapor assisted VUV
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering