We report that fully ordered L10 FePt magnetic thin films with high coercivity can be fabricated by a simple sputtering method at a substrate temperature of 300°C. Although fcc → L10 ordering proceeds only above 600°C in ex situ annealing of disordered FePt films, the ordering occurs spontaneously by surface diffusion during the sputtering process of FePt alloy upon heating the substrate at 300°C. High coercivity larger than 7 kOe was achieved from the as-sputtered state.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Issue number||12 B|
|Publication status||Published - 2001 Dec 15|
- Ordering temperature
- Surface diffusion
ASJC Scopus subject areas
- Physics and Astronomy(all)