LSI on-chip optical interconnection with Si nano-photonics

Junichi Fujikata; Kenichi Nishi; Akiko Gomyo; Jun Ushida; Tsutomu Ishi; Hiroaki Yukawa; Daisuke Okamoto; Masafumi Nakada; Takanori Shimizu; Masao Kinoshita; Koichi Nose; Masayuki Mizuno; Tai Tsuchizawa; Toshifumi Watanabe; Koji Yamada; Seiichi Itabashi; Keishi Ohashi

doi:10.1093/ietele/e91-c.2.131

LSI on-chip optical interconnection with Si nano-photonics

Junichi Fujikata^*, Kenichi Nishi, Akiko Gomyo, Jun Ushida, Tsutomu Ishi, Hiroaki Yukawa, Daisuke Okamoto, Masafumi Nakada, Takanori Shimizu, Masao Kinoshita, Koichi Nose, Masayuki Mizuno, Tai Tsuchizawa, Toshifumi Watanabe, Koji Yamada, Seiichi Itabashi, Keishi Ohashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

LSI on-chip optical interconnections are discussed from the viewpoint of a comparison between optical and electrical interconnections. Based on a practical prediction of our optical device development, optical interconnects will have an advantage over electrical interconnects within a chip that has an interconnect lengthless than about 10mm at the hp32-22nm technology node. Fundamental optical devices and components used in interconnections have also been introduced that are small enough to be placed on top of a Si LSI and that can be fabricated using methodsc ompatible with CMOS processes. A SiON waveguide showed a low propagation loss around 0 .3dB/cm at a wavelength of 850nm, and excellent branching characteristics were achieved for MMI (multimode interference) branch structures. A Si nano-photodiodse howed highly enhanced speed and efficiency with a surface plasmon antenna. By combining our Si nano-photonic devices with the advanced TIA-less optical clock distribution circuits, clock distribution above 10GHz can be achieved with a small footprint on an LSI chip.

Original language	English
Pages (from-to)	131-137
Number of pages	7
Journal	IEICE Transactions on Electronics
Volume	E91-C
Issue number	2
DOIs	https://doi.org/10.1093/ietele/e91-c.2.131
Publication status	Published - 2008 Feb
Externally published	Yes

Keywords

LSI
Optical interconnect
Si nano-photodiode
Si nano-photonics
SiON waveguide
Surface plasmon antenna
TIA-less optical clock circuit

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1093/ietele/e91-c.2.131

Cite this

Fujikata, J., Nishi, K., Gomyo, A., Ushida, J., Ishi, T., Yukawa, H., Okamoto, D., Nakada, M., Shimizu, T., Kinoshita, M., Nose, K., Mizuno, M., Tsuchizawa, T., Watanabe, T., Yamada, K., Itabashi, S., & Ohashi, K. (2008). LSI on-chip optical interconnection with Si nano-photonics. IEICE Transactions on Electronics, E91-C(2), 131-137. https://doi.org/10.1093/ietele/e91-c.2.131

Fujikata, J, Nishi, K, Gomyo, A, Ushida, J, Ishi, T, Yukawa, H, Okamoto, D, Nakada, M, Shimizu, T, Kinoshita, M, Nose, K, Mizuno, M, Tsuchizawa, T, Watanabe, T, Yamada, K, Itabashi, S & Ohashi, K 2008, 'LSI on-chip optical interconnection with Si nano-photonics', IEICE Transactions on Electronics, vol. E91-C, no. 2, pp. 131-137. https://doi.org/10.1093/ietele/e91-c.2.131

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AU - Itabashi, Seiichi

AU - Ohashi, Keishi

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LSI on-chip optical interconnection with Si nano-photonics

Abstract

Keywords

ASJC Scopus subject areas

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