Measurement of extreme-high-vacuum pressure by laser ionization

Kiyohide Kokubun; Shingo Ichimura; Shigeyuki Sekine; Hazime Shimizu

doi:10.1143/JJAP.32.L1109

Measurement of extreme-high-vacuum pressure by laser ionization

Kiyohide Kokubun, Shingo Ichimura, Shigeyuki Sekine, Hazime Shimizu

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10^-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

Original language	English
Pages (from-to)	L1109-L1111
Journal	Japanese journal of applied physics
Volume	32
Issue number	8 A
DOIs	https://doi.org/10.1143/JJAP.32.L1109
Publication status	Published - 1993 Aug
Externally published	Yes

Keywords

H
Laser ionization
Pressure measurement
XHV

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.32.L1109

Cite this

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title = "Measurement of extreme-high-vacuum pressure by laser ionization",

abstract = "Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.",

keywords = "H, Laser ionization, Pressure measurement, XHV",

author = "Kiyohide Kokubun and Shingo Ichimura and Shigeyuki Sekine and Hazime Shimizu",

year = "1993",

month = aug,

doi = "10.1143/JJAP.32.L1109",

language = "English",

volume = "32",

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journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "8 A",

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T1 - Measurement of extreme-high-vacuum pressure by laser ionization

AU - Kokubun, Kiyohide

AU - Ichimura, Shingo

AU - Sekine, Shigeyuki

AU - Shimizu, Hazime

PY - 1993/8

Y1 - 1993/8

N2 - Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

AB - Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

KW - H

KW - Laser ionization

KW - Pressure measurement

KW - XHV

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U2 - 10.1143/JJAP.32.L1109

DO - 10.1143/JJAP.32.L1109

M3 - Article

AN - SCOPUS:0027640914

SN - 0021-4922

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SP - L1109-L1111

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 8 A

ER -

Measurement of extreme-high-vacuum pressure by laser ionization

Abstract

Keywords

ASJC Scopus subject areas

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