Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.
|Journal||Japanese journal of applied physics|
|Issue number||8 A|
|Publication status||Published - 1993 Aug|
- Laser ionization
- Pressure measurement
ASJC Scopus subject areas
- Physics and Astronomy(all)