Measurement of extreme-high-vacuum pressure by laser ionization

Kiyohide Kokubun, Shingo Ichimura, Shigeyuki Sekine, Hazime Shimizu

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

Original languageEnglish
Pages (from-to)L1109-L1111
JournalJapanese journal of applied physics
Issue number8 A
Publication statusPublished - 1993 Aug
Externally publishedYes


  • H
  • Laser ionization
  • Pressure measurement
  • XHV

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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