MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)

Shinji Motokawa; Mohamed Mohamedi; Toshiyuki Momma; Shuichi Shoji; Tetsuya Osaka

doi:10.1016/j.elecom.2004.04.007

MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)

Shinji Motokawa, Mohamed Mohamedi^*, Toshiyuki Momma, Shuichi Shoji, Tetsuya Osaka

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

187 Citations (Scopus)

Abstract

A design for a novel micro direct methanol fuel cell (μ-DMFC) of 0.018 cm² active area is described. The μ-DMFC was prepared using a series of fabrication steps from micro-machined silicon wafer including photolithography, deep reactive ion etching, and electron beam deposition. The novelty of this structure is that we have fabricated the anodic and cathodic micro-channels arranged in plane, dissimilar to the conventional bipolar structure. The first objective of the experimental trials was to verify the feasibility of this novel structure on basis of MEMS technology. Preliminary testing results show that this new concept μ-DMFC generates electricity.

Original language	English
Pages (from-to)	562-565
Number of pages	4
Journal	Electrochemistry Communications
Volume	6
Issue number	6
DOIs	https://doi.org/10.1016/j.elecom.2004.04.007
Publication status	Published - 2004 Jun

Keywords

Electroplating
Methanol
Micro-DMFC
Micro-fuel cell
Micro-power

ASJC Scopus subject areas

Electrochemistry

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10.1016/j.elecom.2004.04.007

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title = "MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)",

abstract = "A design for a novel micro direct methanol fuel cell (μ-DMFC) of 0.018 cm2 active area is described. The μ-DMFC was prepared using a series of fabrication steps from micro-machined silicon wafer including photolithography, deep reactive ion etching, and electron beam deposition. The novelty of this structure is that we have fabricated the anodic and cathodic micro-channels arranged in plane, dissimilar to the conventional bipolar structure. The first objective of the experimental trials was to verify the feasibility of this novel structure on basis of MEMS technology. Preliminary testing results show that this new concept μ-DMFC generates electricity.",

keywords = "Electroplating, Methanol, Micro-DMFC, Micro-fuel cell, Micro-power",

author = "Shinji Motokawa and Mohamed Mohamedi and Toshiyuki Momma and Shuichi Shoji and Tetsuya Osaka",

note = "Funding Information: This work was supported by a Grant-in-Aid for Scientific Research on the priority area of DMFC (Grant no. 13134204), COE Research “Molecular Nano-Engineering”, and 21C-COE Programme “Practical Nano-Chemistry” from The Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. We would like to thank Dr. Mizuno of Nanotechnology Laboratory for suggestions on fluid injection system.",

year = "2004",

month = jun,

doi = "10.1016/j.elecom.2004.04.007",

language = "English",

volume = "6",

pages = "562--565",

journal = "Electrochemistry Communications",

issn = "1388-2481",

publisher = "Elsevier Inc.",

number = "6",

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TY - JOUR

T1 - MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)

AU - Motokawa, Shinji

AU - Mohamedi, Mohamed

AU - Momma, Toshiyuki

AU - Shoji, Shuichi

AU - Osaka, Tetsuya

N1 - Funding Information: This work was supported by a Grant-in-Aid for Scientific Research on the priority area of DMFC (Grant no. 13134204), COE Research “Molecular Nano-Engineering”, and 21C-COE Programme “Practical Nano-Chemistry” from The Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. We would like to thank Dr. Mizuno of Nanotechnology Laboratory for suggestions on fluid injection system.

PY - 2004/6

Y1 - 2004/6

N2 - A design for a novel micro direct methanol fuel cell (μ-DMFC) of 0.018 cm2 active area is described. The μ-DMFC was prepared using a series of fabrication steps from micro-machined silicon wafer including photolithography, deep reactive ion etching, and electron beam deposition. The novelty of this structure is that we have fabricated the anodic and cathodic micro-channels arranged in plane, dissimilar to the conventional bipolar structure. The first objective of the experimental trials was to verify the feasibility of this novel structure on basis of MEMS technology. Preliminary testing results show that this new concept μ-DMFC generates electricity.

AB - A design for a novel micro direct methanol fuel cell (μ-DMFC) of 0.018 cm2 active area is described. The μ-DMFC was prepared using a series of fabrication steps from micro-machined silicon wafer including photolithography, deep reactive ion etching, and electron beam deposition. The novelty of this structure is that we have fabricated the anodic and cathodic micro-channels arranged in plane, dissimilar to the conventional bipolar structure. The first objective of the experimental trials was to verify the feasibility of this novel structure on basis of MEMS technology. Preliminary testing results show that this new concept μ-DMFC generates electricity.

KW - Electroplating

KW - Methanol

KW - Micro-DMFC

KW - Micro-fuel cell

KW - Micro-power

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SN - 1388-2481

VL - 6

SP - 562

EP - 565

JO - Electrochemistry Communications

JF - Electrochemistry Communications

IS - 6

ER -

MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)

Abstract

Keywords

ASJC Scopus subject areas

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