TY - JOUR
T1 - MEMS optical interferometry-based pressure sensor using elastomer nanosheet developed by dry transfer technique
AU - Takahashi, Kazuhiro
AU - Fujie, Toshinori
AU - Sato, Nobutaka
AU - Takeoka, Shinji
AU - Sawada, Kazuaki
N1 - Funding Information:
Acknowledgments This work was supported in part by Grant-in-Aid for Young Scientists (A) (26709025 and 15H05355) from the Japan Society for the Promotion of Science, and the Precursory Research for Embryonic Science and Technology (PRESTO) (JPMJPR1526 and JPMJPR152A) from the Japan Science and Technology Agency.
Publisher Copyright:
© 2018 The Japan Society of Applied Physics.
PY - 2018/1
Y1 - 2018/1
N2 - We developed an elastomer-based Fabry-Perot interferometer with a submicron gap between a freestanding thin film and a substrate by a dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides a low Young's modulus of 40 MPa, a large elastic strain of 38%, and high adhesiveness. A freestanding SBS nanosheet can be formed by a dry transfer technique without vacuum and high-temperature processes owing to the high adhesiveness of SBS nanosheets. With the pressure change, the freestanding nanosheet was found to deform with good adhesion between the dry transferred SBS and the substrate.
AB - We developed an elastomer-based Fabry-Perot interferometer with a submicron gap between a freestanding thin film and a substrate by a dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides a low Young's modulus of 40 MPa, a large elastic strain of 38%, and high adhesiveness. A freestanding SBS nanosheet can be formed by a dry transfer technique without vacuum and high-temperature processes owing to the high adhesiveness of SBS nanosheets. With the pressure change, the freestanding nanosheet was found to deform with good adhesion between the dry transferred SBS and the substrate.
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U2 - 10.7567/JJAP.57.010302
DO - 10.7567/JJAP.57.010302
M3 - Article
AN - SCOPUS:85040325120
SN - 0021-4922
VL - 57
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - 1
M1 - 010302
ER -