@inproceedings{4b47f9d27ed647318a460f81e05690b1,
title = "Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC)",
abstract = "High efficient micro electrochemical devices are realized by the increase of the electrode surface areas keeping the chip size. Use of the 3-D electrodes instead of the planar electrodes is quite effective for this purpose. To realize a metal pattern on 3-D structures, spray coating method was utilized and the optimum condition to achieve good step coverage was observed. Good step coverage of photoresist was obtained on the obtuse corner formed by anisotropic wet etching of (100) silicon and even vertical comer formed by deep RIE. We applied this method to fabricate a high performance micro direct methanol fuel cell (μDMFC). The open circuit voltage of 548mV and the maximum power density of 0.72mW/cm2 were obtained at room temperature with 2M methanol.",
keywords = "3-D electrode, 3-D microfabrication, Fuel cell, Spray coating, μDMFC",
author = "Hiroaki Houjou and Shinji Motokawa and Masanori Ishizuka and Jun Mizuno and Toshiyuki Momma and Tetsuya Osaka and Shuichi Shoji",
year = "2005",
month = nov,
day = "9",
doi = "10.1109/SENSOR.2005.1497352",
language = "English",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "1437--1440",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}