Micro chamber for cellar analysis integrated with negligible dead volume sample injector

Masaki Kanai*, Hirohsia Abe, Tatsuya Munaka, Y. Yoichi Fujiyama, Daisuke Uchida, Asako Yamayoshi, Hiroaki Nakanishi, Akira Murakami, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

20 Citations (Scopus)


A micro chamber integrated with an extremely low dead volume sample injector for real-time monitoring of living cell was developed. By means of the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE, the sample injector with negligible dead volume of less than 0.05nl is realized. Using fabricated devices, the reproducible sample injection of the order of 1nl was obtained. Biological cell culture of rat mast cell was also performed in the fabricated micro chamber.

Original languageEnglish
Pages (from-to)129-134
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number2-3
Publication statusPublished - 2004 Sept 1
EventSelected Papers from Transducers 03 - Boston, MA, United States
Duration: 2003 Jun 82003 Jun 12


  • Cell analysis
  • Cell culture
  • Microvalve
  • Sample injector

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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