Abstract
A micro flow cell for blood gas monitoring is fabricated on a silicon wafer to realize a very small sample volume. It has a Clark-type micro PO2 sensor, a Severinghaus-type microPCO2 sensor and an ISFET-type pH sensor. The cell size is 1.0 cm × 0.6 cm × 0.8 cm and the necessary sample volume is about 0.34 μl.
Original language | English |
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Pages (from-to) | 205-208 |
Number of pages | 4 |
Journal | Sensors and Actuators: B. Chemical |
Volume | 8 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1992 May |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry