Micro Flow Devices

Shuichi Shoji; Takahiro Arakawa; Masaki Kanai; Hironobu Sato

doi:10.3131/jvsj.49.395

Micro Flow Devices

Shuichi Shoji, Takahiro Arakawa, Masaki Kanai, Hironobu Sato

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Original language	English
Pages (from-to)	395-399
Number of pages	5
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	49
Issue number	7
DOIs	https://doi.org/10.3131/jvsj.49.395
Publication status	Published - 2006 Jan

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.3131/jvsj.49.395

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@article{b644cd7b64ce4500ba8f70ef8c4cc351,

title = "Micro Flow Devices",

author = "Shuichi Shoji and Takahiro Arakawa and Masaki Kanai and Hironobu Sato",

year = "2006",

month = jan,

doi = "10.3131/jvsj.49.395",

language = "English",

volume = "49",

pages = "395--399",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "0559-8516",

publisher = "Shinku Kyokai",

number = "7",

}

TY - JOUR

T1 - Micro Flow Devices

AU - Shoji, Shuichi

AU - Arakawa, Takahiro

AU - Kanai, Masaki

AU - Sato, Hironobu

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SN - 0559-8516

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SP - 395

EP - 399

JO - Shinku/Journal of the Vacuum Society of Japan

JF - Shinku/Journal of the Vacuum Society of Japan

IS - 7

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Micro Flow Devices

ASJC Scopus subject areas

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